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기철식(Chul-Sik Kee),최춘기(Choon-Gi Choi),윤근병(Keun Byoung Yoon),한상필(Sang-Pi Han),정명영(Myung Yung Jeong) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11
We present that two-dimensional periodic nano-patterns can be embossed on a polymer thin film using the nano-imprint process. The silicon masters with triangular arrays of rods such as square, hexagon, dodecagon and circle were successfully fabricated using the e-beam lithography and inductively coupled plasma etching. We also show that the polymer thin films with two-dimensional periodic patterns, polymer photonic crystals, can exhibit electromagnetic stop bands and the line defects introduced in the periodic patterns can serve as low loss waveguides from the photonic band calculations and the finite difference time domain simulations.