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장혁수(H. S. Chang),박영재(Y. J. Park),장윤석(Y. S. Chang),최재붕(J. B. Choi),김영진(Y. J.Kim),천풍환(P. H. Chun),공재연(J. Y. Kong) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
Conveyor-type transporters have been widely used as a typical delivery system of semi-conductor, FPD and other ITrelated products. However, as the IT-product is getting larger in size and higher in resolution, several problems are caused by mechanical contacts between the transporter and target object. In this context, recently, lots of efforts are being devoted for development of various contact-free handling systems to get rid of defects and oil contaminations. The objectives of this paper are to characterize suspension mechanisms and to investigate air flow effects on air levitation transport system. For this purpose, a series of CFD analyses were carried out and the simulation data showed a good agreement with the corresponding experimental ones. It is anticipated that the promising result can be used as a basis for concept design of the transport system.