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반도체 가공용 순수중의 불순물의 제어와 반도체 소자에 미치는 영향에 관한 연구
池銀相 건국대학교 1986 論文集 Vol.2 No.-
In this study, after discussing quality requirements of pure water for assembling semiconductor elements, seven model pure water manufacturing systems were made and examined the effects of bacteria and particles in the pure water on semiconductor elements for Assembly. As the results, following conclusions were obtained. 1.Inserting UV sterilizer between cartridge polisher and ultrafiltration module, propagation of bacteria was minimized effectively. 2.Examining the effect of temperature on propagation of bacteria in pure water, it was turned out that the bacteria were propagated very rapidly between 26℃ and 33℃. 3.As the results of water pressure experiments, propagation of bacteria was surpressed by increasing water pressure almost near the specific pressure of membrane used. 4.Considering the influence of temperature and pressure on Propagation of bacteria in pure water, it is suggested that adoption of three loops through pretreatment step, make-up step and Polishing step respectively could fairly increase the purity of water. 5.It is found that particle count in each process was changed quite similarly to the change of bateria count through whole system by controlling the bacteria.