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PDMS 유연 몰드를 이용한 구리 마이크로 메쉬 시트의 제작
정순녕(Sun Nyeong Jung),강창근(Chang Kun Kang),정임덕(Im Deok Jung),배공명(Kong Myeong Bae),박치열(Chi Yeol Park),정필구(Phill Gu Jung),고종수(Jong Soo Ko) 대한기계학회 2007 大韓機械學會論文集A Vol.31 No.12
A unique fabrication method for a copper micromesh is proposed and demonstrated. A PDMS mold was fabricated using a microcasting process and then used as a flexible mold in copper electroplating. The fabricated copper micromesh was well formed and connected without any cracks within the entire mold area. The experimental results verified that the fabricated features of the copper micromesh accurately followed the shape of the microstructures of the PDMS mold. This unique fabrication method provides an easy yet precise means of producing three-dimensional metal microstructures.