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하이브리드 코팅 시스템으로 제조된 초고경도 Cr-Si-C-N 나노복합 코팅막의 미세구조 및 기계적 특성
장철식(Chul Sik Jang),허수정(Su Jeong Heo),송풍근(Pung Keun Song),김광호(Kwang Ho Kim) 한국표면공학회 2005 한국표면공학회지 Vol.38 No.3
Cr-Si-C-N coatings were deposited on steel substrate (SKD11) by a bybrid system of arc ion plating (AIP) and sputtering techniques. From XRD, XPS, and HRTEM analyses, it was found that Cr-Si-C-N had a fine composite microstructure comprising nano-sized crystallites of Cr(C,N) well distributed in the amorphous phase of Si₃N₄/SiC mixture. Microhardness of Cr(C,N) coatings and Cr-Si-N coatings were reported about ~22 ㎬ and -35 ㎬, respectively. As the Si was incorporated into Cr(C,N) coatings, The Cr-Si-C-N coatings having a Si content of 9.2 at. % showed the maximum hardness value. As increased beyond Si content of 9.2 at. %, the interaction between nanocrystallites and amorphous phase was gone, the hardness was reduced as dependent on amorphous phase of Si₃N₄/SiC. In addition, the average coefficient of Cr-Si-C-N coatings largely decreased compared with Cr(C,N) coatings.