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전기적 저압 임팩터를 이용한 에피택셜 챔버 내 입자 측정 및 분석
이승재(Seung Jae Lee),김은미(Eun Mi Kim),Vinit Kanade,Pengzhan Liu,금승호(Seung Ho Keum),임홍강(Hong Kang Lim),김태성(Tae Sung Kim) 대한설비공학회 2020 대한설비공학회 학술발표대회논문집 Vol.2020 No.6
The purpose of this study was to measure and analyze the residual particles in the epitaxial growth chamber that can affect the process and the particles generated during the PM(preventive maintenance), which is the process of inspecting and replacing equipment parts. First, we devised a method using an ELPI(electric low pressure impactor) that can conduct real-time measurement of particle number, mass concentration and enable further analysis of chemical component by collecting the particles on the impactor substrates. Based on the result, it was confirmed that there are few particles in chamber before preventive maintenance and it is possible that amount of particles were generated or flowed from outside during the preventive maintenance work. Additionally, the components of the collected particles were analyzed through SEM-EDS analysis.