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스핀-코팅법으로 제작한 K(Ta,Nb)O<sub>3</sub>/Pb(Zr,Ti)O<sub>3</sub> 이종층 박막의 전기 열량 효과
양영민,육지수,김지원,이삼행,박주석,김영곤,이성갑,Yang, Young-Min,Yuk, Ji-Soo,Kim, Ji-Won,Yi, Sam-Haeng,Park, Joo-Seok,Kim, Young-Gon,Lee, Sung-Gap 한국전기전자재료학회 2020 전기전자재료학회논문지 Vol.33 No.6
Heterolayered K(Ta,Nb)O<sub>3</sub>/Pb(Zr,Ti)O<sub>3</sub> thin films on Pt/Ti/SiO<sub>2</sub>/Si substrates were prepared by a sol-gel process and spin-coating method. The structural and electrical properties were measured to investigate the possibility of application as an electrocaloric effect device. All specimens exhibited dense and uniform cross-sectional structures without pores, and the average thickness of the specimen coated six times was approximately 394 nm. Curie temperatures were observed at 5℃ or less in type-I and 10℃ in type-II specimens, respectively. Type-II specimens coated 6 times showed a relative dielectric constant of 758 and remanent polarization of 9.71 μC/㎠ at room temperature. The maximum electrocaloric effect occurred between 20 and 25℃, slightly higher than their Curie temperature, and the electrocaloric property (ΔT) of the type-II specimens coated 6 times was approximately 1.2℃ at room temperature.
육지수 ( Ji-su Yuk ),이삼행 ( Sam-haeng Yi ),이명규 ( Myung-gyu Lee ),박주석 ( Joo-seok Park ),김영곤 ( Young-gon Kim ),이성갑 ( Sung-gap Lee ) 한국전기전자재료학회 2024 전기전자재료학회논문지 Vol.37 No.2
(La0.7Sr0.3)(Mn1-xFex)O3 (LSMFO) (x = 0.03, 0.06, 0.09, 0.12) precursor solution are prepared by sol-gel method. LSMFO thin films are fabricated by the spin-coating method on Pt/Ti/SiO2/Si substrate, and the sintering temperature and time are 800℃ and 1 hr, respectively. The average thickness of the 6-times coated LSMFO films is about 181 to 190 nm and average grain size is about 18 to 20 nm. As the amount of Fe added in the LSMFO thin film increased, the resistivity decreased, and the TCR and B25/65-value increased. Electrical resistivity, TCR and B25/65-value of the (La0.7Sr0.3)(Mn0.88Fe0.12)O3 thin film are 0.0136 mΩ-cm, 0.358%/℃, and 328 K at room temperature, respectively. The resistivity properties of LSMFO thin films matched well with Mott’s VRH model.