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미소 유량 측정을 위한 마이크로 전자 유량 센서의 제작
윤현중(Hyeun Joong Yoon),김순영(Soon Young Kim),양상식(Sang Sik Yang) 한국센서학회 2000 센서학회지 Vol.9 No.5
N/A This paper presents the fabrication of a micro electromagnetic flow sensor for the liquid flow rate measurement. The micro electromagnetic flow sensor has some advantages such as a simple structure, no heat generation, a rapid response and no pressure loss. The principle of the micro electromagnetic flow sensor is based on Faraday`s law. If conductive fluid passes through a magnetic field, the electromotive force is generated and detected by two electrodes on the wall of the flow channel The flow sensor consists of two permanent magnets and a silicon flow channel with two electrodes. The dimension of the flow sensor is 9 mm x 9 mm x 1 mm. The micro flow channel is mainly fabricated by anisotropic etching of two silicon wafers, and the detection electrodes are fabricated by metal evaporation process. The characteristic of the fabricated flow sensor is obtained experimentally. When the flow rates of water with the conductance of 100-200 μS/cm are 9.1 ml/min and 62 ml/min, the generated electromotive forces are 261 μV and 7.3 mV, respectively.
A Nickel Nanowire Diluter Operating through the Principle of the Dielectrophoretic Attraction Force
양진호(Jinho Yang),윤현중(Hyeun Joong Yoon),양의혁(Eui-Hyeok Yang),양상식(Sang Sik Yang) 대한전기학회 2010 전기학회논문지 Vol.59 No.2
This paper presents a microfabricated nanowire diluter which dilutes the concentration of nanowires in solution instead of by the conventional centrifuge process. The device has 16 pairs of gold electrodes in a micro channel composed of a glass substrate and PDMS. We prepared nickel nanowires by the template-directed electrodeposition method using nanoporous anodized aluminum template (AAO). We injected the Dimethylformamide (DMF) solution containing nanowires into the inlet of the diluter while applying square wave voltages on the electrodes to trap the nanowires at the subsequent gold electrodes by means of dielectrophoretic attraction forces. The concentration of nanowires at the outlet of the micro channel was changed as we expected, which illustrates that the device can effectively dilute nanowires and can be applied to a controlled assembly of nanowires.