http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
- 中文 을 입력하시려면 zhongwen을 입력하시고 space를누르시면됩니다.
- 北京 을 입력하시려면 beijing을 입력하시고 space를 누르시면 됩니다.
RISS 인기검색어
- 검색키워드
- 저자 : 윤여경 ( Sung Pil Lee (검색결과 7 건)
- 무료
- 기관 내 무료
- 유료
-
고주파 마그네트론 스퍼터링에 의한 TiO2-x 박막 습도센서의 습도감지특성
이성필,윤여경 ( Sung Pil Lee,Yeu Kyung Yoon ) 한국센서학회 1998 센서학회지 Vol.7 No.2
TiO_(2-x) thin film humidity sensors have been fabricated by sputtering method and their physical and hygroscopic characteristics have been investigated. The sputtering conditions and sintering conditions affect the sensor`s sensitivity toward humidity. AES and SEM micrographs were taken for the analysis of crystal structures, surface morphology caused by adsorbed water vapour. TiO_(2-x) humidity sensors showed negative impedance-humidity characteristics and the sensor which was fabricated by experimental condition 2(rf power of 200W) showed higher sensitivity and linearity than others. Then the slope of the sensor was about 0.794 ㏀/%RH and the response time of TiO_(2-x) humidity sensors was about 2 min. for adsorption and about 3 min. for desorption at the operating temperature of 30℃.
-
이성필,임재영,윤여경,Lee, Sung-Pil,Rim, Jae-Young,Yoon, Yeo-Kyoung 한국센서학회 1992 센서학회지 Vol.29 No.3
습도감지물질로서 PMMA박막을 사용하여 저항형 습도감지소자를 제조하고 그 특성을 조사하였다. PMMA에 DVB를 첨가하여 가교결합을 일으키고 여기에 PVA를 섞어 제조된 습도센서는 상대습도의 증가에 따라 저항의 변화를 나타내었으며, 흡착에 비해 탈착 시 약 3% 미만의 히스테리시스 특성을 나타내었다. 또한 제조된 소자는 좋은 장기안정도를 보였으며, 응답시간은 흡착시에는 약 7분, 탈착시에는 약 5분이었다. A resistive-type humidity sensors have been fabricated using cross-linked PMMA thin film as sensing material and their humidity characteristics have been investigated. The sensor coated of the cross-linked PMMA with PVA exhibited largely variation of resistance by increase of relative humidity and less than 3% of hysteresis. Furthermore, the fabricated sensor exhibited superior long-term stability. The response time of the PMMA humidity sensor was about 7 min. for adsorption and about 5 min. for desorption respectively.
-
이성필,임재영,윤여경 ( Sung Pil Lee,Jae Young Rim,Yeo Kyoung Yoon ) 한국센서학회 1992 센서학회지 Vol.1 No.1
A resistive-type humidity sensors have been fabricated using cross-linked PMMA thin film as sensing material and their humidity characteristics have been investigated. The sensor coated of the cross-linked PMMA with PVA exhibited largely variation of resistance by increase of relative humidity and less than 3 % of hysteresis. Furthermore, the fabricated sensor exhibited superior long term stability. The response time of the PMMA humidity sensor was about 7 min. for adsorption and about 5 min. for desorption respectively.
-
이성필,윤여경,김종수 慶南大學校 附設 工業技術硏究所 1997 硏究論文集 Vol.15 No.1
위상각 차에 의한 이동방향 및 거리를 구할 수 있는 모델을 제시하고, 다이폴 안테나 어레이와 방탐 처리회로를 이용한 방향탐지 시스템을 설계하였다. 컴퓨터 시뮬레이션 결과 높은 이득과 대칭성이 나타났으며, 360 MHz에서 우수한 필터링 특성을 나타내었다. We suggested a new model which can be obtained moving directions using tangential function by phase difference of arrayed poles, which can be calculated the displacement by measured initial and final direction angles. A detecting system for moving object has been designed by dipole antenna array and driving circuits. The designed system showed high gain and good symmetric and filtering characteristics in 360 MHz through computer simulation.
-
이성필,윤여경,김성진 慶南大學校 附設 工業技術硏究所 1998 硏究論文集 Vol.16 No.-
실리콘 마이크로 테크롤로지를 이용하여 MOSFET의 게이트 금속 전극사이에 감습물질인 TiO₂ 박막을 형성하여 MOSFET의 전계효과와 TiO₂박막의 습도감지 특성을 결합시킨 형태의 FET형 습도센서를 제조하고, 습도변화에 따른 감지 특성을 조사하였다. 제조된 HUSFET은 전형적인 enhancement 특성이 나타났으며, 문턱전압은 상대습도 60%에서 약 2.7 V였다. 상대습도가 30%에서 90%로 증가함에 따라 HUSFET의 문턱 전압은 3.0 V에서 2.4 V로 감소하였으며, 드레인 전류는 335μA에서 405μA로 증가하였다. 드레인과 게이트 전압을 고정하였을 때 HUSFET의 감도는 3.2gμA/RH로 나타났다. A new device, named humidity sensitive field effect transistor(HUSFET), for an integrated humidity sensors has been fabricated using conventional silicon micro-technology. The gate structure of the HUSFETs is TiO₂/Si₃N₄/SiO₂and water molecular permeable electrode is formed by thin porous gold. The fabricated devices showed typical enhancement mode characteristics and threshold voltage was about 2.7 V in 60 %RH. It can be seen that the threshold voltages of HUSFET decreased from 3.0 V to 2.4 V and the drain current increased from 335μA to 405 gμA according to increasing the relative humidities from 30% to 90%. The sensitivity of HUSFET was 3.2μA/RH when the drain and gate voltage are constant.
-
이성필,윤여경 경남대학교 환경문제연구소 2000 환경연구 Vol.23 No.-
MIS Capacitor multi-layer humidity sensors that Ti0₂/Si0₂/Si₃N₄ and porous gold electrode are deposited onto the gate insulator layer have been fabricated and their characteristics have been investigated for environmental monitoring. The normalized capacitance increased from 0.49 to 0.57, as relative humidity increased from 30% to 90%. The sensor sensitivities at 60% RH and 90% RH were about 17.4% and 29.5%, respectively, and it showed a relatively high linearity. The response time of the fabricated sensor was about 15 sec. in adsorption process.
-
이성필,윤여경 경남대학교 신소재연구소 1996 論文集 Vol.6 No.-
TiO_(2-x) 박막 습도센서를 R.F. 스퍼터링에 의해 제조하고, 스퍼터링 조건과 산소 함유량 그리고 열처리 조건에 따른 습도 감지 특성 및 동작 온도에 따른 특성 등을 조사하였으며, Auger 전자분광기와 전자현미경으로 그 원인을 규명하였다. TiO_(2-x) 박막 습도센서는 부 임피던스 습도특성을 보였으며 가장 높은 감도와 선형성을 보일 때의 산소조성비에 따른 기울기는 x=0.38인 소자가 약 -0.033이었고, 감도는 동작온도가 30℃일 때 74%이었다. 동작온도가 30℃일 때 응답 시간은 흡착시 약 2분, 탈착시에는 약 3분이었다. TiO_{2-x} thin film humidity sensors have been fabricated by sputtering method and their physical and hygroscopic characteristics have been investigated. The sputtering conditions, oxygen contents and sintering conditions affect the sensor's sensitivity toward humidity. AES and SEM micrographs were taken for the analysis of crystal structures. surface morphology caused by adsorbed water vapour. TiO_{2-x} humidity sensors showed negative impedance-humidity characteristics and the sensor which was x=0.38 showed higher sensitivity and linearity than others. Then the slope of the sensor was about -0.033 and the sensitivity was about 74% at the operating temperatute of 30 C. The response time of TiO_{2-x} humidity sensors was about 2 min. for adsorption, and about. 3 min. for desorption at the operating temperature of 30℃.
ScienceON
KISS연관 검색어 추천
이 검색어로 많이 본 자료
활용도 높은 자료
