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미세접촉인쇄기법을 이용한 다기능성 자기조립막 제작과 전자ㆍ생물소자로의 응용
최대근(Dae-Geun Choi),유형균(Seung-Man Yang),양승만(Hyung Kyun Yu),조정대(Jeongdai Jo),이응숙(Eungsug Lee) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4
In this work, we fabricated various 2D metallic and polymeric nanopatterns with the feature resolution of<br/> sub-micrometer scale by using the method of microcontact printing ( CP) based on soft lithography. Silicon<br/> masters for the micromolding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS)<br/> molds were composed of a thin, hard layer supported by soft PDMS layer. Finally, monodisperse metal or<br/> polymer particles could be obtained in the prepared pattern for the application of electronic devices.