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RISS 인기검색어
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- 저자 : 유중렬(J. Y. Yoo) (검색결과 5 건)
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강자성체 박막(Co-Ni)의 자기-저항효과에 관한 연구(II)
장충근,유중렬,남선우,손대락,Chang, C.J.,Yoo, J.Y.,Nam, S.W.,Son, D.R. 한국센서학회 1994 센서학회지 Vol.3 No.1
Grid type 70Ni-30Co thin films on slide glass at $250^{\circ}C$ has been fabricated to develope. From fabricated sensors using above process, we investigated the relation of temperature, resistivity, line width to magnetoresistance and we obtained the following results after observation of coercive force, saturated magnetization, maxium usable sensitivity, delay time, slew rate, white noise, resolution of the sensors. We confirmed that the $600{\AA}$ thin film at $250^{\circ}C$ formed crystalized magnetic anisotropy spontaneously and the sensor using the thin film had capability of detecting magnetic field with sensitivity of 230 nT. In these devices, the magnetoresistance change was increased linearly in ${\pm}10$ Oe range, and the magnetoresistance effect was increased when the ratio between line width and length was increased. When the devices was soldered using indium, the temperature-resistivity coefficient showed $8{\times}10^{-3}/deg$ and increased during the specific properties as magnetic field sensor were weakened. In this studies, the coercive forces of the films were about 5.1 A/cm and saturated magnetizations were 0.64 T, and the delay time in these devises was $5{\mu}s$ and slew rate showed 0.39 $Oe/{\mu}s$ and white noise was -120 dB. 강자성체 자기저항 센서를 개발하기 위하여 70Ni-30Co 합금을 $10^{-6}$ Torr의 진공중에서 $250^{\circ}C$ 의 슬라이드 그라스 위에 두께 $600{\AA}$ 으로 진공 증착한 후 박막을 격자형으로 식각하고 인출선을 연결하였다. 이와 같은 과정으로 제작된 센서의 자기저항 변화율에 미치는 온도, 저항, 선폭 등의 영향을 조사하고 보자력, 포화자화, 최대유효감도, 지연시간, 회전율, 백색잡음, 분해능 등을 조사 분석한 결과, (70Ni-30Co) 합금을 기판온도 $250^{\circ}C$ 에서 두께 $600{\AA}$ 으로 진공 증착하면 결정자기 이방성이 형성되어 자기저항 소자로써의 기능이 자발적으로 구비되면서 230 nT 의 최대유효감도가 구비됨을 확인하였다. ${\pm}10$ Oe 의 자장구간에서는 직선적인 자기저항변화를 보였으며, 센서소자를 형성하는 격자선의 폭에 대한 길이의 비가 클수록 자기저항 값이 증가함을 알 수 있었다. 한편 센서 소자와 인출선을 인듐으로 연결시키면 저항온도계수가 $8{\times}10^{-3}/deg$로 증가되어 센서 본연의 저항온도계수($1{\times}10^{4}/deg$)가 매우 심하게 열화된다는 것을 알 수 있었다. 이 실험에서 제작된 강자성박막(70Ni-30Co)의 특성은 보자력이 5.1 A/cm이고 포화자화가 0.64T 이었는데, 이 박막으로 제작한 자기저항 센서의 지연시간은 $5{\mu}s$이었고 회전율(slew rate)은 0.39 $Oe/{\mu}s$ 이었으며 백색잡음은 -120 dB 정도이었다.
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강자성체 박막 ( Co-Ni ) 의 자기 - 저항효과에 관한 연구 ( 2 )
장충근,유중렬,남선우,손대락 ( C . J . chang,J . Y . Yoo,S . W . Nam,D . R . Son ) 한국센서학회 1994 센서학회지 Vol.3 No.1
Grid type 70Ni-30Co thin films on slide glass at 250℃ has been fabricated to develope. From fabricated sensors using above process, we investigated the relation of temperature, resistivity, line width to magnetoresistance and we obtained the following results after observation of coercive force, saturated magnetization, maxium usable sensitivity, duty time, slew rate, white noise, resolution of the sensors. We confirmed that the 600Å thin film at 250℃ formed crystalized magnetic anisotropy spontanernisly and the sensor using the thin film had capability of detecting magnetic field with sensitivity of 230 nT. In these devices, the magnetoresistance change was increased linearly in ±10 Oe range, and the magnetoresistance effect was increased when the ratio between line width and length was increased. When the devices was soldered using indium, the temperature-resistivity coefficient showed 8 X 10^(-3)/deg and increased during the specific properties as magnetic field sensor were weakened. In this studies, the coercive forces of the films were about 5.1 A/cm and saturated magnetizations were 0.64 T, and the delay time in these devises was 5 ㎲ and slew rate showed 0.39 Oe/us and white noise was -120 dB.
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손대락(D. Son),임순재(S. J. Lim),유중렬(J. Y. Yoo),김창석(C. S. Kim) 한국자기학회 1991 韓國磁氣學會誌 Vol.1 No.2
A new kind of a non-contact torque sensor which uses the difference of the maximum magnetic inductions as measurand was constructed. The torque sensor utilizes the tensile and compressive stress of two cores which are attached on the rotating shaft. This sensor shows that the linearity was better than 1%, and the transient torque can be measured at the sampling rate of 10 ㎑ which is the same as magnetizing frequency of the core.
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장충근,손대락,유중렬,윤만영,김영일,박재형 경북대학교 센서기술연구소 1994 연차보고서 Vol.1994 No.-
본 연구에서는 MR센서의 민감성을 향상시키기 위하여 current path의 잡음 거동을 면밀히 조사 분석한 결과 센서의 잡음이 current path의 저항값에 의존함을 확인하고 저저항, 저잡음 MR 센서를 설계, 제작하였다. 이 과정에서 current path의 폭(w)과 두께(t)의 값이 추적되었으며 t/w=10^-3에서 가장 예리한 민감성이 확인되었다. 한편 센서의 선형성을 향상시키기 위하여 current path를 주축에 대하여 45°로 배열하였으며 지향성을 향상시키기 위하여 full brige센서를 half bridge센서로 분리하였다. 또한 높은 SNR을 얻기 위해 센서를 AC bias로 여기시키고 이 여기 유기된 신호를 동기 정류할 수 있도록 시스템을 설계 제작하였다. 이상의 연구에서 33V/T의 민감도를 얻었다. In this experiment we have investigated and carefully analyzed the' noise phenomena of the current path of magnetoresistive sensors for high sensitivity. We confirmed that the noise depended on the resistance of the current path. We likewise tried to manufacture the sensors which haxe low resistance and low noise characteristics. Also, when we increased the width of the current path and current density and decreased the width of gaps, the sensitivity of sensors was improved. In this process we have searched the value of current path thickness(t) and path width, and we obtained the best sensitivity in the ratio of t/w = 10^-3. On other hand we arranged the current paths to be inclined at an angle of 45 degrees from the main axis for the improvement of the linearity of the sensor response, and separated the full-bridge sensor to half bridge sensor in order to improve the sensor's directivity. Furthermore, exiting the sensor with AC bias in order to get higher SNR we manufactured a system that can synchronously rectify the signal induced by the excitation and obtained the sensitivity of 33V/T.
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