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노지환(Jiwhan Noh),이제훈(Jae-Hoon Lee),손현기(Hyonkee Sohn),서정(Jeong Suh),신동식(Dongsing Shin) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
Picosecond(ps) laser micro-machining has emerged as an attractive method of fabricating high-precision microstructures, especially in metals. In this paper, a metallic mold for diffraction gratings is fabricated with a mode-locked 12 ps Nd YVO₄ laser Laser pulses with a wavelength of 355㎚ are irradiated on the surface of NOK 80, a mold material, to generate line patterns. In order to minimize the line width, laser power is set just above the ablation threshold of NOK 80. Results show that the spectrum from the fabricated mold is good enough for some industrial application