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마름모형 AFM 캔틸레버를 이용한 고분자 나노섬모의 점착력 측정
이학주(H-J Lee),조기호(K-H Cho),김재현(J-H Kim),유영은(Y-E Yoo),김완두(W-D Kim),김종만(J-M Kim),김용권(Y-K Kim),백창욱(C-W Baek) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
In the previous works, the success of rhombus-shaped AFM cantilever manufactured by standard MEMS process has been already proved by performing mechanical bending tests at a micro/nano-scale. In this paper, nano-newton scale adhesive force between micro/nano hair structure and silicon tip is measured by AFM at the atmospheric condition. A nano-hair structure of cyclic olefin copolymer (COC) is fabricated using an anodized aluminum oxide template. The diameter and the length of the nano-hair are approximately 150 ㎚ and 10 ㎛, respectively. This paper outlines a research process that encompasses: 1) design and fabrication of a symmetric rhombus-shaped AFM cantilever, 2) fabrication process of a polymeric nano-hair structure, and 3) adhesion test of nano-hair structure using the manufactured cantilever.
띠 굽힘 시험을 통한 100 ㎚ 두께 금 박막의 기계적 특성 평가
김재현(J.H. Kim),이학주(H.J. Lee),한승우(S.W. Han),백창욱(C.-W. Baek),김종만(J.-M. Kim),김용권(Y.-K. Kim) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
Nanometer-sized structures are being applied to many devices including micro/nano electronics, optoelectronics, quantum devices, MEMS/NEMS, biosensors, etc. Especially, the thin film with submicron thickness is a basic structure for fabricating these devices, but its mechanical behaviors are not well understood. The mechanical properties of the thin film are different from those of the bulk structure and are difficult to measure because of its handling inconvenience. Several techniques have been applied to mechanical characterization of the thin film, such as nanoindentation test, micro/nano tensile test, strip bending test, etc. In this study, we focus on the strip bending test because of its high accuracy and moderate specimen preparation efforts, and measure Au thin film, which is a very popular material in micro/nano electronic devices. Au film is deposited on Si substrate by evaporation process, of which thickness is 100㎚. Using the strip bending test, we obtain elastic modulus, yield and ultimate tensile strength, and residual stress of Au thin film.