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이규훈(Gyu Hoon Lee),이응석(Eung Suk Lee),이민기(Min Ki Lee),김진수(Jin Su Kim),배일진(Il Jin Bae) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
Diaphragm type noncontact automatic control valve is a valve for controling acidic PR(Photo Resist) liquid used in the semiconductor process. PR(Photo Resist) is Photosensitive liquid to change phase depending on light transmittance. Because liquid is very toxic and expensive, the purpose is to prevent loss due to leaks fluid flow. This design of noncontact precise automatic control valve is expected to play an important role in energy saving and environmental improvement. In this dissertation, A process of diaphragm type automatic control valve's design and simulation is introduced. In addition, through the analysis of fluid flow , valve is intended to evaluate and develop.