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박성근,백민수,배승춘,권성열,김광태,김기완,Park, Seong-Geun,Baek, Min-Su,Bae, Seung-Chun,Gwon, Seong-Yeol,Kim, Gwang-Tae,Kim, Gi-Wan Materials Research Society of Korea 1999 한국재료학회지 Vol.9 No.2
LiNbO$_3$films were prepared by an rf-magnetron sputtering technique using sintered target containing potassium. The potassium was included to help to fabricate stoichiometric LiNbO$_3$film. Structural and electrical properties of thin films was investigated as a function of deposition condition. Optimum sputtering conditions were rf power of 100W, working pressure of 1m Torr and substrate temperature of 58$0^{\circ}C$. The thin film was grown to (012) preferred orientation. The dielectric constant of the thin film LiNbo$_3$ fabricated under optimum condition was 55 at 1MHz. Average grain size is about 200$\AA$ and roughness of the film is small enough to apply to optic devices.
PERL ( passivated emitter and rear locally - diffused cell ) 방식을 이용한 고효율 Si 태양전지의 제작 및 특성
김우현 ( Woo Hyun Kim ),권오준 ( Oh Joon Kwon ),남기홍 ( Ki Hong Nam ),김기완 ( Ki Wan Kim ),권성렬 ( Sung Yeol Kwon ),정훈 ( Hun Jeoung ),김영우 ( Yeung Woo Kim ),배승춘 ( Seung Chun Bae ),박성근 ( Sung Keoun Park ) 한국센서학회 1999 센서학회지 Vol.8 No.3
The n^+/p/P^+ junction PERL solar cell of 0.1∼2 Ω·cm (100) p type silicon wafer was fabricated through the following steps; that is, wafer cutting, inverted pyramidally textured surfaces etching by KOH, phosphorus and boron diffusion, anti-reflection coating, grid formation and contact annealing. At this time, the optical characteristics of device surface and the efficiency of doping concentration for resistivity were investigated. And diffusion depth and doping concentration for n+ doping were simulated by silvaco program. Then their results were compared with measured results. Under the illumination of AM(air mass)1.5, 100 mW/㎠ I_(sc), V_(oc), fill factor and the conversion efficiency were 43mA. 0.6 V, 0.62. and 16% respectively.
PERL (Passivated Emitter and Rear Locally-Diffused Cell) 방식을 이용한 고효율 Si-Solar Cell의 제작 및 특성
정훈,김영우,배승춘,김정환,권성렬,김기완 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
The solar cell producing the highest efficiency is the PERL( Passivated Emitter, Rear Locally-Diffused Cell) developed at the University of New South Wales, Australia. Silicon n^(+)/p/p^(+) junction PERL solar cell was fabricated through the following steps,: wafer cutting, inverted pyramidally textured surfaces etching by KOH, Phosphorus diffusion, anti-reflection coating application, grid formation and contact annealing. The cell area was 1cm^(2) and under the AM(air mass)1.5. For PERL solar cell with inverted pyramidally textured, its conversion efficiency was about 17.1%. The efficiency of cell without textured surface was 13.8%. When adapting textured surface to the cell, the efficiency has been improved .