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single phase-vanadium dioxide 박막을 이용한 온도센서에 관한 연구
김지홍(Ji-hong Kim),홍성민(Sung-min Hong),곽연화(Yeon-hwa Kwak),박순섭(Soon-seob Park),황학인(Hak-in Hwang),문병무(Byung-moo Moon) 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.10
In bio applications, high temperature coefficient of resistance (TCR) at 30℃~40℃ is especially important for a temperature sensor. In this work, single phase-vanadium dioxide (VO₂) thin films for temperature sensor were fabricated by reactive DC magnetron sputtering and post-annealing method. VO<SUB>x</SUB> thin films deposited by reactive sputtering in a controlled Ar/O₂ atmosphere can be transformed into single phase-VO₂ films by post-annealing in N₂ atmosphere. The grown VO₂ thin films have a moderate resistance at room temperature and very high TCR at room temperature and transition temperature, respectively 2.88%/K and 15.8%/K. A detailed structural characterization is performed by SEM, XRD and RBS. SEM morphology image indicates that grains of fabricated VO₂ films are homogeneous and ball-like in shape. A fact that the films contain only single phase-VO, is obtained by XRD and RBS analysis. After deposition, the sensors were fabricated by micromachining technology. Silicon nitride membrane and black nickel were used for a thermal isolation structure and absorption layer. In the vicinity of room temperature, the TCR of sensors was enough high to apply for bio sensors.
강상도,김우순,장광호,박순섭,김동현 한국공작기계학회 2005 한국생산제조학회지 Vol.14 No.1
Code V was used to make a plan for collimator lens with aspherical surface in the present study. The acquired optical design data were applied for ultra-precision machining. The optimum properties were determined to find ways to compensate the tool positioning error allowance during the ultra-precision machining. In ultra-precision aspheric machining, figure tolerance corrected by tool positioning error be improved by compensation cycle number.