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ICP-RIE 방법에 의한 Si 식각 특성 개선에 관한 연구
강교성(Gyo-Sung Kang),권순일(Soon-Il Kwon),양계준(Kea-Joon Yang),김홍오(Hong-O Kim),임동건(Dong-Gun Lim) 대한전자공학회 2007 대한전자공학회 학술대회 Vol.2007 No.7
In this paper, deep trench etching of silicon was investigated as a function of source power (300~600 W), DC bias voltage (0~-100 V), O2 addition (0~29%). As increasing the RF source power from 300 W to 700 W, the etch rate was increased from 3.52 ㎛/min to 7.07 ㎛/min. The addition of O₂ gas improved the etch rate and the selectivity. The highest etch rate is achieved at the O₂ gas addition of 12%. The selectivity to PR was 65.75 with O₂ gas addition of 24%. At DC bias voltage of -40 V and C₄F? gas flow rate of 30 seem, We were able to achieve etch rate as high as 5.25 ㎛/min with good etch profile.
Display 응용을 위한 Nano Template 공정 최적화 및 CNT 성장연구
강교성(Gyo-Sung Kang),권순일(Soon-Il Kwon),김홍오(Hong-O Kim),임동건(Dong-Gun Lim),양계준(Kea-Joon Yang) 대한전자공학회 2007 대한전자공학회 학술대회 Vol.2007 No.7
In this paper, established process of AAO template produce and analysed and observed being growth CNT(Carbon nanotube) after processing of CVD with FE-SEM and Raman spectrum. AAO template analysed four kinds of substrate about Al/Si, Al/SiO₂/Si, Al/Ni/Ti/Si, Al sheet, and then make CNT grow using CVD. The Size of manufactured pore adjusted approximately from 30 ㎚ to 70 ㎚ and length adjusted from 300 ㎚ to 1 ㎛. Diameter of CNT was 40 ㎚ and length grow about 1 ㎛.
金洪五 충주대 산업과학기술연구소 1999 産業科學論文集 Vol.7 No.1
In this paper, we develope the system to measure quantitatively the finger force for O- Ring test, which systemized by M.D. Yoshiaki Omura. The system consists of the finger force transducer using strain gage and S/W to monitoring the strength of force in NoteBook PC. In process of experiment, we check the developed system has the ability to measure the finger force and to distinguish the variation of the finger force according to each experiment parameters, five foods.
金洪五 忠州大學校 1982 한국교통대학교 논문집 Vol.15 No.2
The stepper motor is capable of converting a digital signal into a shaft position. The logic circuitry feeding the windings supplies the proper sequence of polarities required for the stepping action. The transfer function for the stepper motor is developed from the same approach used to derive the transfer function of a servomotor, After deriving the transfer function, the author compares its response with that of a conventional servomotor and discusses the effects of parameter variations on its performance.
金洪五 忠州大學校 1985 한국교통대학교 논문집 Vol.19 No.1
Calculation of motion profiles are very impotant in motion control engineering. Precisely calculated motion profiles, acceleration/ deceleration, velocity and displacement profiles for both rotational and linear movements provide necessary data for detailed design of an incremental motion control system.
最適狀態로 動作하는 스텝모터의 數學的 모델에 關한 考察
金洪五 충주대학교 1983 한국교통대학교 논문집 Vol.16 No.1
A fine positioning technique based on the small displacement that can be obtained around a stepping position by applying differential currents to the motor windings is discused. A linear mathematical model of the motor operating in this fashion is this fashion is derived from the analysis of the motor.
金洪五 충주대학교 1990 한국교통대학교 논문집 Vol.24 No.-
The plethsmography of this paper is composed of the circuit which is able to display a fiducial mark by differentiating ECG signal so as to effectively reduce affects of patient's breathing and the motion artifact when the physiological data from the heart of the patient is obtained, and another circuit which enables to reduce a base impedance through the ADC. Also the spot electode instead to conveniently feel, there by cardiac data from the patient being measured.
平均 Wiener 필터에 의한 誘發電位 檢出에 關한 硏究
金洪五 忠州大學校 1986 한국교통대학교 논문집 Vol.20 No.1
This paper subscribes the average wiener filtering which can detect the evoked potentials and the detecting system which is implemented with the microcomputer. It is found that the filtering efficiency of the average Wiener filtering improved with the averaging times and the average Wiener filtering is more effective then the averaging for detecting the evoked potential
金洪五 忠州大學校 1995 한국교통대학교 논문집 Vol.30 No.2
In this paper, we study myoelectric signal variation through kyungrak needle stimulation, The signal is detected from two kyungrak route of arm; before and after stimulation of a needle, and before and after needle rotation. The detected signals are analyzed at frequency domain to search a characteristic parameters. As the results, when the same stimulation methode is used at two different kyungrak route respectively, it is found that the variation of the myoelectric signal is not same.