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문성남(Sung Nam Moon),이동언(Dong Eon Lee),김석범(Seok Pum Kim),강석환(Seock Hwan Kang),박시환(Si Hwan Park),이우일(Woo Il Lee) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.11
Nano imprint lithography (NIL) is the most promising fabrication technology due to its high resolution, fast throughput, and cost-effective fabrication in science and industry of micro/nano manufacturing. In NIL process, polymer flow and large demolding force arising are important problems for process productivity and final product features. This demolding force can cause fracture and deformation to polymer and mold patterns. Adhesion and friction from mold-polymer contact play key role in the demolding force. In this study, we measured demolding force in NIL process and micro/nano scale force by AFM (Atomic Force Microscopy) experiment for different surface treatments.