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미세 부품 조작을 위한 탄성힌지 기반 압전소자 구동형 초정밀 머니퓰레이션 시스템
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),고국원(Kuk Won Ko) 제어로봇시스템학회 2009 제어·로봇·시스템학회 논문지 Vol.15 No.9
This paper presents a manipulation system consisting of a coarse/tine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The tine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and tine manipulation of micro parts.