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Polishing Characteristics of MnO2 Polishing Slurry on the Si-face of SiC Wafer
Tao Yin,Tosiro Doi,구로가와슈헤이,Zhao zhong Zhou,Kai ping Feng 한국정밀공학회 2018 International Journal of Precision Engineering and Vol.19 No.12
To realize an efficient and high-quality chemical-mechanical polishing process for the surface of a SiC wafer, a new type of MnO2 slurry is developed employing the multi-valence and oxidation-reduction characteristics of MnO2 particles. This slurry is utilized to polish the Si-face of SiC wafers. In this paper, the influences of the polishing particle concentration and the pH of slurry on MRR are analyzed, the polishing performance of the MnO2 slurry is studied, and the polishing mechanism of the MnO2 slurry on the SiC wafer is determined. The polishing mechanism of the MnO2 slurry is verified by selecting commonly used additives, such as KMnO4, and the influence of the additive amount on the MRR is analyzed. Finally, the surface morphology of the material after polishing is observed with analytical instruments. The experimental results show that the MRR of the MnO2 slurry is highly dependent on the pH value of the slurry. The MnO2 particles tend to convert into MnO4 - ions in an alkaline environment, and the strong oxidizing property of MnO4 - ions greatly improves the polishing efficiency. As the MnO4 - ion concentration increases, the MRR can reach over 600 nm/ h, and an ultra-smooth surface with a surface.
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문성민(Sung-Min Moon),강재화(Jae-Hwa Kang),키도히로미쯔(Hiromitsu Kido),구로가와슈헤이(Syuhei Kurokawa),류성기(Sung-Ki Lyu) 한국기계가공학회 2012 한국기계가공학회지 Vol.11 No.1
Gears are reliable and efficient power transmission elements. They have been widely used in all kinds of machinery. Nowadays, resource conservationㆍenergy conservationㆍenvironmental improvements from the request of the compact, light weight, high efficiency, low costㆍHigher efficiency is required. Tooth root and bottom profiles of cylindrical gears affect bending fatigue life, but they are hard to measure with conventional gear measuring machine(GMM), because GMM is normally customized to measure only gear working flanks. The authors try to develop a new type of GMM by installing an extra 3D scanning probe and control software to measure tooth root and bottom profiles. First, in order to measure in various directions, a 3D scanning probe has been attached to the GMM developed. Next, calibration algorithm has been developed. Deviations of the calibration results are measured and it is found that systematic error must be caused by heat from driving motors. A new alternative GMM with driving motors generating less heat was designed and two GMMs are compared. Finally, 3 Dimension measurement of tooth root and bottom profiles of cylindrical gears is described.
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