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이경훈(K.H. Lee),고대철(D.C. Go),김상주(S.J. Kim),김병민(B.M. Kim) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
This paper presents a study on micro forming technologies for micro-electro-mechanical systems(MEMS) parts such as micro gears below 450㎛ in diameter and 38 in module. For this purpose, it is important to develop new methods to fabricate micro gears and choose suitable materials for micro forming. Generally micro gears made by MEMS process butin this study micro gears made by extrusion process using micro dies. Photochemically machinable glass has been used to fabricate micro dies by photo-lithography and anisotropic etching techniques. A new forward extrusion machine has been developed for this study. LLDPE(Linear Low Density Polyethylene) and EVA(Ethylene Vinyl Acetate) have been used in micro extrusion. Specimens were placed in a container and extruded by a piezoelectric actuator. Micro extrusion has succeeded in forming micro-gear shafts.