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압전박막을 이용한 감압전장효과 트랜지스터 ( PSFET ) 의 동작특성
남기홍 ( Ki Hong Nam ),손병기 ( Byung Ki Sohn ),조병욱 ( Byung Woog Cho ),양규석 ( Gyu Suk Yang ),군대혁 ( Dae hyuk Kwon ) 한국센서학회 1995 센서학회지 Vol.4 No.2
A new FET type semiconductor pressure sensor (FSFET : pressure sensitive field effect transistors was fabricated and its operational characteristics were investigated. A ZnO thin film as a piezoelectric layer, 5000Å thick, was deposited on a gate oxide of FET by RF magnetron sputtering. he deposition conditions to obtain a axis poling structure were substrate temperature of power of 140watt, and working pressure of 5mtorr in Ar ambience. The fabricated PSFET den-ice showed good linearity and stability in the applied pressure range(1x10^5 Pa∼4x10^5 Pa)
양규석,권대혁,남기홍,손병기 경북대학교 센서기술연구소 1994 센서技術學術大會論文集 Vol.5 No.1
A new FET type pressure sensor has been investigated to overcome the problems of the conventional silicon piezoresistive and capacitive pressure sensor. The PSFET( pressure sensitive field effect transistor) is a new FET type pressure sensor which the operation theory is combined with the field effect of MOSFET and the piezoelectric effect of piezoelectric thin films. This sensor can overcome the fabrication problems of conventional silicon pressure sensors and realize productivity, standardization, miniaturization, integration because the whole fab. process is compatible to the planar technology. A ZnO thin film as a piezoelectric material, 5000Å thick, was deposited on a FET gate by RF magnetron sputtering and the optimum deposition condition was 300℃ substrate temperature, 5mtorr working pressure, Ar ambient and 140watt RF power, respectively. And the device was annealed at 400℃, O_(2) ambient for 1 hour to obtain a better C-axis poling structure. The fabricated PSFET device showed piezoelectric voltage(40mV/kgf/cd) and sensitivity (21μA/kgf/cm^(2)) according to an applied pressure(1kgf/cm^(2)~4kgf/cm^(2)).
손규석 원광대학교 2008 圓光軍事論壇 Vol.- No.4
The point of departure of this study involves the Kosovo crisis in the late 1990s in which the U.S. intervened with military forces and the international political environment surrounding the significant event in the post Cold War era. The United States carried out military intervention by placing regional security organization, NATO(North Atlantic Treaty Organization) at the head as crisis of humanitarian disaster occurred at Kosovo in former Federal Republic of Yugoslavia(FRY) due to internal conflict. This was the first military intervention that was carried out in Europe and the first American military intervention since the Cold War ended. The military intervention of the U.S. in Kosovo done on a foundation included the following goals. First, it was to consider the negative effects that would influence the stability of neighboring countries and the Balkan region due to group-scale ethnic cleansing characteristic of state terrorism and appearance of a large quantity of refugees. Second, it was to recover the reliability of NATO as European military allied body. Third, it was to deter the influencing power of enlarging West European Union of which was centered by Germany. And finally, it was to restrain Russia who intended to pursue supremacy in the region through 'Pan-Slave nationalism.' On the other hand, superficial purpose which lead the United States to intervened in Kosovo militarily was humanitarian manifestation, to protect Kosovar Albanians from infringement of human rights committed by Slobodan Milosevic. However, it had the hidden intention to pursue regional stability by precluding the appearance of Serbian imperialism and extension of internal war in the Balkan area. On the strategical dimension, the United States tried to maintain its influential power in Europe by blocking strategical cooperation of France-Germany-Russia and strengthening the role of NATO, when west European countries tried to escape from the United States control. And Russia which had judged that Serbia was politically, historically and religiously friendly nation and a strategical partner, that could work as an advancing base to the Balkan peninsula used the Kosovo crisis as the opportunity to recover its weakened political influencing power in Europe. The United States initiated military intervention in Kosovo as a part of strategy to restrain these intentions.