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      • Study on the Structure of Sputter Metallic Glass Thin Film to Micro-Mirror

        ( Zhao-ying Wang ),( Yu-yen Chen ),( Yao-chuan Tsai ) 한국농업기계학회 2018 한국농업기계학회 학술발표논문집 Vol.23 No.1

        This study used sputter to deposit iron-based metallic glass thin films on micro-mirror surfaces, and then magnets are placed on both sides of the micro-mirror to polarize the Fe-based thin film, then input AC current to the coil which will produce a magnetic field, and the magnetic field will make the micro-mirror rotation. There are two different torsion bar sizes designed, which are the samples A length: 300 μm, width: 20 μm, thickness: 10 μm and the sample B length: 500 μm, width: 50 μm, thickness: 10 μm. And the resonant frequency of these two samples simulated by ANSYS was 601 Hz and 827 Hz. The measurement of the resonance frequency, we inputted AC 4V <sub>PP</sub> to coil made the micro-mirror rotation and used the laser light irradiating on the micro-mirror. From this we can know the actual resonance frequency of micro-mirror of sample A and sample B are 554Hz, 496Hz and maximum rotation angles were 77 degrees and 30 degrees, respectively.

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        Experimental investigation of a process cooling system retrofitted with HFC-404A refrigerant for precise manufacturing application

        Fu-Jen Wang,Kuei-I Tsai,Yao-Jun Wang,Hao-Chuan Lee 대한기계학회 2011 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.25 No.2

        Precise-manufacturing facilities, which emphasize accurate and stable machining of the working components to be used in semiconductor industry, cannot function properly without appropriate and precise cooling. HCFC (hydro-chloro-floro-carbon) has been commonly used as the coolant for precise manufacturing facilities; but it is facing the pressing schedule to be phased out. Additionally, the dramatic variation of heat load during high-accuracy and high-speed applications need a critical control of coolant (brine or water) temperature. Use of eco-friendly HFC 404A to replace HFC has been suggested as an effective alternative to alleviate the problems. In this study, the performance of a process cooling system retrofitted with HFC-404A refrigerant was evaluated; the energy efficiency ratio and accuracy of temperature control specific to -15℃ precise manufacturing application were examined. Effects of using thermostatic expansion valve associated with hot-gas by-pass control scheme under different loading conditions have been investigated extensively. The energy efficiency ratio and accuracy of temperature control for the cooling system were measured and analyzed for comparing and evaluating HCFC-22 and HFC-404A using different throttling devices under specific coolant temperatures. The comprehensive studies on improving the accuracy of temperature control and energy-saving efficiencies through different temperature control strategies are presented in this paper.

      • Fabrication and Study of Novel Piezoresistive Polymer Composites Sensor for 3D Printing Applications

        ( Yu-yen Chen ),( Cheng-chun Huang ),( Ching-yuan Su ),( Yao-chuan Tsai ) 한국농업기계학회 2018 한국농업기계학회 학술발표논문집 Vol.23 No.1

        With the technology development, the technique of 3D printing has gradually matured. The characteristic of 3D printing is that it can print the product directly without another complex process. If the 3D printing could be applied to manufacturing sensor elements, it could be quicker and cheaper for the sensor element fabrication and the sensor forms will be applicable. Piezoresistive effect is a common sensor sensing principle which is through the deformation of the material to cause the resistance changes. In this study, a piezoresistive polymer composites material was developed, which can be manufactured by the photo-curable 3D printing. The different amount of the conductive carbon black (CB) nanoparticles was employed and added into photo-curable resin for obtaining the conductive percolation threshold of the polymer composites and measuring the piezoresistivity of the polymer composites. The conductive percolation threshold is around 1.0~1.5wt%, and the gauge factor of 1.5wt% is 9~17. The gauge factor was found which would decrease with the increasing strains. This study can be applied on fabricating the piezoresistive pressure and tactile sensors which can be used to the agricultural, industrial and various industries.

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