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( Hongsik Jung ) 한국센서학회 2021 센서학회지 Vol.30 No.6
The effect of the specifications of a silicon-on-insulator vertical slot optical waveguide on the sensitivity of homogeneous and surface sensing configurations for TE and TM polarization, respectively, was systematically analyzed using numerical software. The specifications were optimized based on the confinement factor and transmission power of the TE-guided mode distributed in the slot. The waveguide sensitivities of homogeneous and surface sensing were calculated according to the specifications of the optimized slot optical waveguide.
구속계수와 감지도에 기반한 집적광학 바이오케미컬 센서에 적합한 수직 SOI 슬롯 광 도파로 최적화
정홍식 ( Hongsik Jung ) 한국센서학회 2021 센서학회지 Vol.30 No.3
The optimization of the specifications of vertical silicon on insulator (SOI) slot optical waveguides suitable for integrated-optical biochemical sensors was performed through computational analysis of the confinement factor of the guided mode distributed in the slot in addition to analytical examination of the TE mode. The optimized specifications were confirmed based on sensitivity in terms of the change in the refractive index of the biochemical analyte. When the slot width, rail width, and height were set to 120 nm, 200 nm, and 320 nm, respectively, the confinement factor was evaluated to be about 56% and the sensitivity was at least 0.9 [RIU/nm].
Ti:LiNbO₃ Y-fed Balanced-Bridge 마하젠더 간섭 광변조기를 이용한 집적광학 전계센서에 관한 연구
정홍식(Hongsik Jung) 대한전자공학회 2016 전자공학회논문지 Vol.53 No.1
집적광학 Ti:LiNbO₃ 1×2 Y-fed Balanced-Bridge 마하젠더 간섭기(YBB-MZI) 구조에 다이폴 패치 아테나를 적용해서 1.3 ㎛파장대역에서 동작하는 전계센서를 구현하였다. BPM 전산모사를 통해서 소자 설계 및 동작성능을 검증하였고, 1.3 ㎛ 파장대역에서 ∼16.6 V 스위칭전압과 이에 대응해서 소멸비는 ∼14.7 ㏈로 측정되었다. 10 ㎒, 50 ㎒ 각각의 주파수에서 감지 가능한 최소 전계는 1.12 V/m, 3.3 V/m로 측정 되었으며, 이에 대응되는 각 주파수에서 ∼22 ㏈, ∼18 ㏈의 다이나믹 범위가 측정되었다. 제작된 센서는 0.29∼29.8 V/m 범위의 전계세기에 대해서 선형응답 특성을 나타내었다. We have demonstrated a Ti:LiNbO₃ electro-optic electric-field sensors utilizing a 1×2 Y-fed balanced-bridge Mach-Zehnder interferometric (YBB-MZI) modulator which uses a 3-dB directional coupler at the output and dipole patch antenna. The operation and design were proved by the BPM simulation. A dc switching voltage of ∼16.6 V and an extinction ratio of ∼14.7 ㏈ are observed at a wavelength of 1.3 ㎛. For a 20 ㏈m rf power, the minimum detectable electric-fields are ∼1.12 V/m and ∼3.3 V/m corresponding to a dynamic range of about ∼22 ㏈ and ∼18 ㏈ at frequencies 10 ㎒ and 50 ㎒, respectively. The sensors exhibit almost linear response for the applied electric-field intensity from 0.29 V/m to 29.8 V/m.
Si<sub>3</sub>N<sub>4</sub> 립-광도파로의 두-수평모드 파워결합과 소산파 기반 집적광학 바이오센서 설계
정홍식 ( Hongsik Jung ) 한국센서학회 2020 센서학회지 Vol.29 No.3
We studied an integrated-optic biosensor configuration that operates at a wavelength of 0.63 μm based on the evanescent-wave and two horizontal mode power coupling of Si<sub>3</sub>N<sub>4</sub> rib-optical waveguides formed on a Si/SiO<sub>2</sub>/Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> multilayer thin films. The sensor consists of a single-mode input waveguide, followed by a two-mode section which acts as the sensing region, and a Y-branch output for separating the two output waveguides. The coupling between the two propagating modes in the sensing region produces a periodically repeated optical power exchanges along the propagation. A light power was steered from one output channel to the other due to the change in the cladding layer (bio-material) refractive index, which affected the effective refractive index (phase-shift) of two modes through evanescent-wave. Waveguide analyses based on the rib optical waveguide dimensions were performed using various numerical computational software. Sensitivity values of 12~23 and 65~165 au/RIU, respectively for the width and length of 4 μm, and 3841.46 and 26250 μm of the two-mode region corresponding to the refractive index range 1.36~1.43 and 1.398~1.41, respectively, were obtained.
평면 광도파로 기반의 소산파 집적광학 바이오센서의 감지도 최적화에 관한 정규화 해석에 관한 연구
정홍식 ( Hongsik Jung ) 한국센서학회 2018 센서학회지 Vol.27 No.1
Closed-form analytical expressions and 3-dimensional normalized charts for the homogeneous sensing and surface sensing structures are derived to provide the conditions for the maximum sensitivity of integrated-optic biosensors based on evanescent-wave and stepindex planar optical waveguides. The analysis is made for transverse electric (TE) polarization mode, in both cases where the measurand is homogeneously distributed in the cover (namely, homogeneous sensing), and where it is an ultrathin film on the waveguide-cover interface (namely, surface sensing)
Jung, Sang Min,Park, Chul Jin,Jeong, Hongsik,Shin, Moo Whan Elsevier 2017 Materials science in semiconductor processing Vol.60 No.-
<P><B>Abstract</B></P> <P>We investigate the effect of the number of laser pulses on the formation of p<SUP>+</SUP>/n silicon ultra-shallow junctions during non-melt ultra-violet laser (wavelength, 355nm) annealing. Through surface peak temperature calculating by COMSOL Multiphysics, the non-melt laser thermal annealing is performed under the energy density of 130mJ/cm<SUP>2</SUP>. We demonstrate that increasing the number of laser pulses without additional pre-annealing is an effective annealing method for achieving good electrical properties and shallow junction depth by analyzing sheet resistance and junction depth profiles. The optimal number of laser pulses is eight for achieving a high degree of activation of dopant without further increase of junction depth. We have also explained the improved electrical characteristics of the samples on the basis of fully recovered crystallinity as revealed by Raman spectroscopy. Thus, it is suggested that controlling the number of laser pulses with moderate energy density is a promising laser annealing method without additional pre-annealing.</P>