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강성제어 구조물을 이용한 수평구동형 박막 PZT 엑츄에이터의 설계, 제작 및 특성평가
서영호(Y.H. Seo),최두선(D.S. Choi),이준형(J.H. Lee),이택민(T.M. Lee),제태진(T.J. Je),황경현(K.H. Whang) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
We present a piezoelectric actuator using stiffness control and stroke amplification mechanism in order to make large lateral displacement. In this work, we suggest stiffness control approach that generates lateral displacement by increasing the vertical stiffness and reducing the lateral stiffness using additional structure. In addition, an additional structure of a serpentine spring amplifies the lateral displacement like leverage structure. The suggested lateral PZT actuator (bellows actuator) consists of serpentine spring and PZT/electrode layer which is located at the edge of the serpentine spring. The edge of the serpentine spring prevents the vertical motion of PZT layer, while the other edge of the serpentine spring makes stroke amplification like leverage structure. We have determined dimensions of the bellows actuator using ANSYS simulation. Length, width and thickness of PZT layer are 135㎛, 20㎛ and 0.4㎛, respectively. Dimensions of the silicon serpentine spring are thickness of 25㎛, length of 300㎛, and width of 5㎛. The bellows actuator has been fabricated by SOI wafer with 25㎛-top silicon and 1㎛-buried oxide layer. The bellows actuator shows the maximum 3.93±0.2㎛ lateral displacement at 16V with 1㎐ sinusoidal voltage input. In the frequency response test, the fabricated bellows actuator showed consistent displacement from 1㎐ to 1k㎐ at 10V. From experimental study, we found the bellows actuator using thin film PZT and silicon serpentine spring generated mainly laterally displacement not vertical displacement at 16V, and serpentine spring played role of stroke amplification.
PZT 액추에이터를 이용한 위치결정용 정밀스테이지의 개발
정동호(Dong-ho Jung),남기호(Ki-Ho Nam),권현규(Hyun-Kyu Kweon),최성대(Sung-Dae Choi) 한국기계가공학회 2007 한국기계가공학회 춘추계학술대회 논문집 Vol.2007 No.-
Most of the nano-positioning systems(stage) are accomplished by a flexure hinge mechanism, which is two or three multilayer PZT actuators to realize the high accuracy and long range[1]. In this paper, it can be made by a new nano stage with the clamp characteristics that is composed of the step motor, one multilayer PZT actuator and the displacement sensor unit. The displacement of stage is acquired by the control of the two clamp between the step motor and the PZT actuator. basic properties of the positioning stage are presented. From these results, we can know that the new nano stage can be made by only one multilayer PZT actuator
PZT를 이용한 광 정보저장기기용 액추에이터의 트랙 추적제어
정동하,박태욱,박노철,양현석,이우철 한국소음진동공학회 2004 한국소음진동공학회 논문집 Vol.14 No.5
This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.
PZT 액추에이터를 이용한 ㎜범위의 위치결정용 정밀스테이지의 개발
정동호(Dong-Ho Jung),남기호(Ki-Ho Nam),권현규(Hyun-Kyu Kweon) 한국기계가공학회 2008 한국기계가공학회지 Vol.7 No.1
This paper presents a new precision stage by using the PZT actuator and stepping motor. The stage have the precision positioning mechanism that has been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulatneously. The stage is composed not of the mechanical elastic hinge but of the clamp, and only one PZT actuator. The displacement of stage is acquired by the control of the two clamp between the PZT actuator. The results of the FEM analysis in the contact pali of the clamp and basic properties of the positioning system are also presented. Using the new stage proposed in this paper.
윤소남(So-Nam Yun),김찬용(Chan-Yong Kim),윤동원(Dong-Won Youn),류병순(Byung-Soon Ryoo),이경우(Kyung-Woo Lee) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
This paper presents a new control mechanism for the proportional pressure control which is accomplished by electro-pneumatic regulator using two PZT digital valves. proportional pressure control technique is very important because that can derive improvement of product quality and driving ability in the pneumatic system. solenoid actuator method for pressure control is widely used but this actuator has a high power consumption characteristics. So new actuator is required for the energy saving. In this study, PZT actuator for the pressure control was fabricated and experimented instead of the conventional type solenoid actuator. Operating voltage of 24[V], maximum pressure of 0.14[㎫] and maximum flow of 1.5[lpm] were gotten from the experimented PZT actuator. Experiments for the new control mechanism of the electro-pneumatic regulator were operated under the input condition of 0.1[㎫] and it was confirmed that this mechanism has a good control characteristics to the response sensitivity and hysteresis.
유니몰프 PZT 액츄에이터를 이용한 정밀 이송기구의 개발
권현규(Hyun-Kyu Kweon),최성대(Sung-Dae Choi) 한국기계가공학회 2008 한국기계가공학회지 Vol.7 No.1
This paper presents a new precision moving instrument for the displacement and direction control using the uni-morph type PZT actuator. The instrument is composed of the two-body and a link. The body has the uni-morph type PZT actuator, which make the vibration. Movement of simple moving instrument is generally analyzed by the theory of center-of-gravity moment. However the analysis of the instrument in this paper is focused the resonance of instrument. Resonance of the body is originated a uni-morph type PZT actuator that is vibrated by voltage and frequency. The basic performances of one body instrument are analyzed by the FEM analysis. And experiments are also performed to confirm the linear movement of the instrument and direction control. it is proper a voltage control than a frequency control for the direction changing. And Moving velocity is 0.032㎧.
윤소남(So-Nam Yun),김찬용(Chan-Yong Kim),박중호(Jung-Ho Park),윤동원(Dong-Won Youn) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
This paper presents a new control mechanism for the proportional pressure control which is accomplished by electro-pneumatic regulator using two PZT actuators. The electro-pneumatic regulator of this study is 2-stage type and consists of two piezoelectric actuators, a controller and a main poppet valve. The piezoelectric actuators are multilayer bender type and are controlled by digital signal. Proportional pressure control technique is very important because that can derive improvement of product quality and driving ability in the pneumatic system. Solenoid actuator method for pressure control is widely used but this actuator has a high power consumption characteristics. So new actuator is required for the energy saving. In this study, PZT actuator for the pressure control was fabricated and experimented instead of the conventional type solenoid actuator. Experiments for the new control mechanism of the elector-pneumatic regulator were operated under the input condition of 0.4[㎫] and it was confirmed that this mechanism has a good control characteristics to the response sensitivity and hysteresis.
홍진욱(J. U. Hong),이제훈(J. H. Lee),서정(J. Suh),신동식(D. S. Shin) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
In this study, we have investigated the micromachining of PZT to fabricate interdigitated electrodes of electro active material actuator using Nd:YAG laser. We have observed groove shapes of PZT with changing beam power, scanning speed, gas, and so on to find optimum conditions of the laser processing for PZT grooves. As a result, this method has been applied to the laser micromachining for grooves in PZT surface, and we could have optimum parameters of Nd:YAG laser. Finally it was shown that the laser micromachining of PZT can substitute for bonding, etching and deposition processes in fabricating electro active material actuator embedded with interdigitated electrodes.
윤소남(So-Nam Yun),함영복(Young-Bog Ham),박중호(Jung-Ho Park),서정균(Jeong-kyun Seo) 한국자동차공학회 2010 한국자동차공학회 부문종합 학술대회 Vol.2010 No.5
This paper deals with a piezoelectric actuator for grain sorter. The grain sorter is a kind of separator which separates the foreign body from the grain, and that consists of a feeder, a shoot, a sensor with a lamp and an ejector. The ejector also consists of a nozzle and a pneumatic valve with a solenoid actuator. The solenoid actuator is very useful for grain sorter because of fast response characteristics and high reliability, but the attraction force of this actuator is affected by environmental temperature and self-excited one. The drop off in attraction force in a grain sorter is a very core parameter for user or consumer because the grain sorter is used at the tropical and temperate regions. High power consumption also leads more and more energy consumption to use the grain sorter. In this study, a new mechanism with an ejector with a piezoelectric actuator is suggested and manufactured. and the frequency characteristics of a manufactured actuator are discussed.
윤소남(So-Nam Yun),함영복(Young-Bog Ham),박중호(Jung-Ho Park),김광영(Kwang-Young Kim),최병오(Byung-Oh Choi) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
The pressure regulator which is used for controlling the reducing pressure in the piezoelectrically driven pneumatic valve has been studied. The pneumatic valve of this study object is 2-stage type and consists of a piezoelectric actuator, a controller, a poppet valve and a pressure regulator. Nominal flow of 50 lpm, maximum operating pressure of 0.9㎫ and frequency characteristic of 10㎐ and over are required in this pneumatic valve, but the pressure regulator is needed because piezoelectric actuator has no ability to control the pressure of 0.9㎫ directly. In this study, bimorph type PZT actuator of 25.2 ㎜(L)×7.2 ㎜(W)×0.5 ㎜(H) with constant of -220×10?¹² CN?¹ was proposed and investigated. Maximum operating force of 0.052 N and maximum displacement of 63 ㎛ were gotten from the fabricated PZT actuator. From the analysis results, the orifice diameter of 0.6㎜ for a piezoelectric actuator was derived and then the pressure regulator which can be operated under 0.15 ㎫ easily was designed and manufactured. Performance and effects of design parameters were simulated by the Simulink of Matlab software, and it was confirmed that the performance characteristics of manufactured pressure regulator are superior in the common use pressure range of 0.5 ㎫ to 0.7 ㎫. The results show that the proposed pressure regulator is suitable for the pneumatic valve with a PZT actuator.