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이주희,최부연,박홍진 慶熙大學校 레이저 工學硏究所 1992 레이저공학 Vol.3 No.-
A high-repetition-rate rare gas halide excimer has been developed, an axial blower circulating laser gas less than at 10m/s and a high-speed command charging power supply with a thyratron were employed for the high repetition-rate operation. The discharge region of 8 x 20 x 600㎣ is UV-preionized by pin sparkes along both sides of main electrodes. The output characteristics of rare gas halide excimer laser were investigated for He buffer gas. We obtained laser output power of 7 W at 100Hz operation.
박홍진,최부연,이주희 慶熙大學校 레이저 工學硏究所 1991 레이저공학 Vol.2 No.-
We have developed a charge-transfer-type ArF/KrF excimer laser for high-efficiency and high-power, and compared the output characteristics and discharge characteristics of the laser system. The maximum output energy and energy density of our ArF/KrF excimer laser are 220, 270 mJ, and 2.46, 1.85 J/l, respectively. The FWHM of laser pulse are 13, 18 ns. The beam divergency of ArF/KrF excimer laser which is represented the spatial characteristics of laser are 5, 8 mrad, respectively.