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Basic Examination on 3D Measuring System Using Pulse-Compression
Ikumatsu Fujimoto,Shigeru Ando 한국정밀공학회 2005 International Journal of Precision Engineering and Vol.6 No.4
In this paper, we propose the basic measurement method of a 3D digitizer using a CCD camera in detail. In the localization measurement with a CCD camera, the effect of the background light and the sensitivity consideration are always problems in realizing a high precision. In this research, a new measurement principle is proposed in which the pulse compression technique known in radar is used to eliminate the effect of background light even under a low intensity light source, and the coordinate values on the CCD camera image plane are determined accurately. From the quantitative evaluation of the S/N ratio improvement and the fundamental experiment, it is verified that a substantial improvement in the S/N ratio is realized for both the background noise and the pixel noise and that a resolution of less than the pixel is sufficiently possible.
Basic Examination on 3D Measuring System Using Pulse-Compression
Fujimoto Ikumatsu,Ando Shigeru Korean Society for Precision Engineering 2005 International Journal of Precision Engineering and Vol.6 No.4
In this paper, we propose the basic measurement method of a 3D digitizer using a CCD camera in detail. In the localization measurement with a CCD camera, the effect of the background light and the sensitivity consideration are always problems in realizing a high precision. In this research, a new measurement principle is proposed in which the pulse compression technique known in radar is used to eliminate the effect of background light even under a low intensity light source, and the coordinate values on the CCD camera image plane are determined accurately. From the quantitative evaluation of the S/N ratio improvement and the fundamental experiment, it is verified that a substantial improvement in the S/N ratio is realized for both the background noise and the pixel noise and that a resolution of less than the pixel is sufficiently possible.
후지모토 이쿠마츠(Ikumatsu Fujimoto),이태용(Lee Taeyong) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.5
When an almost flat surface under test is measured by an interferometer, the measurement result is largely influenced by systematic errors that include geometrical errors of a reference flat surface. To determine the systematic errors of the interferometer by the conventional method that is called the three flat method, we must take the reference flat surface out from the interferometer and measure it. Because of difficulties to set the reference flat surface to the interferometer exactly and quickly, this method is not practical. On the other hand, the method that measures a surface under test with some shifts in the direction being perpendicular to the optical axis of the interferometer is studied. However, the parasitic pitching, rolling and up-down movement caused by the above shifts brings serious error to the measurement result, and the algorithm by which the influences can be eliminated is not still established. In this paper, we propose the self-calibration algorithm for determining the systematic errors that include geometrical errors of a reference flat surface by several rotation shifts and a linear shift of general surface under test, and verify by a numerical experiment that this algorithm is useful for determining the systematic errors.