http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
연마필름을 이용한 센터리스 수퍼피니싱의 연마조건에 관한 기초연구
신오철(O-Chol Shin),정수용(Soo-Ryong Jung),신형재(Hyung-Jae Shin),정윤교(Yoon-Gyo Jung) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
Recently, a demand of accuracy surface roughness about narrow and long components applied to electronics, auto-mobile, machine tool, and aerospace is increased. As a result, compared to a existing grinding system, the development of centerless superfinishing system using abrasive film is expected a high efficiency for reducing time and equal surface roughness. In this study, centerless superfinishing system using abrasive film was developed, thus surface roughness of Ra 0.02㎛ become possible. Farther, standardization of grinding condition and selection of abrasive film to apply real file was investigated.
홍석관(Seok Kwan Hong),권순철(Soon Cheol Kweon),전병희(Byung Hee Jeon),신형재(Hyung Jae Shin) Korean Society for Precision Engineering 2006 한국정밀공학회지 Vol.23 No.8
By removing sacrificial layer through ashing process, movable MEMS structure on substrate can be fabricated in surface micro machining. However, MEMS structure includes, during the ashing process, the warping or buckling effects due to stress gradient along the vertical direction of thin film. In this study, we presented method for counteracting the unwanted deflection of MEMS structure and designed using character of deposit process to overcome limited design conditions. Unit cell patterns were designed with character of deposit shape, and their final shapes were adopted using Finite Element Method. Finally, RF MEMS switch was fabricated by surface micro machining as test vehicles. We checked out that alleviation effect for deformation of switch improved by 35%.