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4절 링크구조를 응용한 플랙셔 힌지 기반 모듈형 나노포지셔너
채기운(Ki Woon Chae),배진현(Jinhyun Bae),정영훈(Young Hun Jeong) Korean Society for Precision Engineering 2011 한국정밀공학회지 Vol.28 No.7
Nanopositioning technologies play an important role in the progress of electronics, optics, bioengineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-㎚. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.
저주파진동의 미세유동에의 영향 관찰을 위한 실험적 접근
김진수(Jin Soo Kim),채기운(Ki Woon Chae),배진현(Jin Hyun Bae),정영훈(Young Hun Jeong),진송완(Songwan Jin) 대한기계학회 2011 대한기계학회 춘추학술대회 Vol.2011 No.10
Recently, there have been various studies for fluidic behavior in micro-channel due to the rapid growth of biochip and MEMs applications. In this study, the fluidic behavior in micro-channel was investigated when low-frequency vibration was given to the micro-channel environment. Especially, an actuation using flexure mechanism and piezo-electric stack actuator was used to generate vibration up to 300 Hz, which was given to the micro-channel directly. The structural characteristics of the experimental setup were investigated to identify the vibratory behavior of the micro-channel. Consequently, the influence of the low-frequency vibration on the fluidic behavior in micro-channel could be observed.