http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
VCM(voice coil motor)를 이용한 3차원 나노 형상 측정 시스템
정종규(Jongkyu Jung),염우섭(Woosub Youm),박기환(Kiyhwan Park) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
In this paper, vibration reduction techniques of a voice coil motor (VCM) actuator are presented for AFM imaging system. The damping coefficient of the actuator driven by VCM with a flexure hinge is quite low and it cause the about 30㏈ peak amplitude response at the resonance frequency. To decrease this peak response, we design and apply elliptical band-stop filters to xy and z axis VCM actuator. Frequency response of each actuator with filter is measured to verify the effect of the filters. As a sensor, capacitive sensor is used. Vibration reduction rate of the xy actuator with the filter is also measured while real AFM scanning condition. As another method, closed loop control with the capacitive sensor is applied to the xy axis actuator to add an electrical damping effect and vibration reduction rate measured. These vibration reduction rates with each method are compared. In the case of z axis actuator, the frequency response of force (gap) control loop is measured. For comparison, the frequency response using a conventional PID controller is also obtained. Finally, the AFM image of a standard grid sample is measured with the designed controller to analyze the effect in the AFM imaging.
정종규(Jongkyu Jung),박원태(Wontae Park),이수만(Sooman Lee),유재은(JaeEun Yoo),최영수(YoungSoo Choi),김성수(SungSoo Kim) 대한전자공학회 2015 대한전자공학회 학술대회 Vol.2015 No.6
When observing the stars from the ground or the measurement of the laser beam which is reflected from the object, the wavefront of the laser is distorted since a change in the wind, air pressure and the movement. To overcome these problem, the adaptive optics system is used. As controller for correction in this system, PI controller is mainly used. The time delay caused by the sensor and the signal processing is increase a phase delay in the Adaptive Optics system. The performance of the controller is decreased. In this paper, we proposed control method for real time correction and minimizing phase delay using phase compensator.
고 에너지 레이저 빔 파면 보정장치의 안정도 향상을 위한 연구
정종규(Jongkyu Jung),이수만(Sooman Lee) 한국컴퓨터정보학회 2018 韓國컴퓨터情報學會論文誌 Vol.23 No.2
The adaptive optics for compensating for optical wavefront distortion due to atmospheric turbulence has recently been used in systems that improve beam quality by eliminating the aberrations of high power laser beam wavefront. However, unseen-mode, which can not be measured in the wavefront sensor, increases the instability of the laser beam wavefront compensator on the adaptive optics system. As a method for improving such instability, a mathematical method for limiting the number of singular values is used when generating the command matrix involved in generation of the drive command of the wavefront compensator. In the past, however, we have relied solely on experimental methods to determine the limiting range of the singular values. In this paper, we propose a criterion for determining the limiting range of the singular values using the driving characteristics and the correlation technique of the wavefront compensator"s actuators and have proved its performance experimentally.