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SEM 에서 2 차 전자 신호의 주파수 분석을 통한 필터 설계
정광오(Kwang Oh Jeong),김승재(Seung Jae Kim),오세규(Se Kyu Oh),김동환(Dong Hwan Kim) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
In scanning electron microscope (SEM), secondary electrons emitted from the specimen are converted to electrical signal. This signal needs to be amplified and converted into digital signal by AD converter. Amplifying the signal will be accompanied by undesirable noise signal which is also amplified, which deteriorates the image quality. If the frequency analysis between secondary electron signal and noise signal will be implemented, a corresponding software processing or a filter design will be beneficial to reducing noise. In this article, frequency analysis and filter design are introduced, resulting in enhanced SEM image quality.