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Thermal Environmental Control Simulation For Large Size Imprint Equipment
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),정재일(Jayil Jeong) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During this process, a small temperature variation makes thermal stress, which causes the horizontal variation of mold and glass. During alignment process to fix the LCD glass on a alignment stage, the vertical displacement is made by the absorption pressure and the shear stress generated by align movement. This study simulates the horizontal displacement of mold and glass due to temperature variation, the vertical displacement depending on the shape of absorption surface fixing the LCD glass on alignment stage, and the horizontal and vertical displacement which occurs in the LCD glass at the alignment process. Algor which is a FEM code for a framework simulation was applied. Temperature variation above ± 0.1℃ on mold and glass causes the horizontal displacement of 150㎚ due to thermal expansion. The vertical displacement due to the circular absorption nozzle is ten times of the case of rectangular absorption nozzle. The estimated displacement of the LCD glass in the alig㎚ent process is about 4.9㎚.
나노 임프린트 장비 환경제어를 위한 초정밀 온도 제어에 관한 연구
박경서(Kyungseo Park),송영중(Youngjoog Song),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Il Jeong),신동훈(Donghoon Shin) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
During a process of a nanoimprint for manufacturing LCD, a small temperature variation on the LCD glass can cause thermal stress and generate unexpected displacement. To avoid this trouble, a precision temperature control unit using thermoelectric modules is appropriate for nanoimprint processes. also an air cooling process using unit take account of air current analysis in chamber is important. The unit consists of an air control system, a cooling water control system, and a power control system. The air control system includes a thermoelectric module, thermocouples measuring temperatures of air and a duct-stale fin, and one air fans. The heat generated by the thermoelectric module is absorbed by the cooling water control system. The power control system catches the temperature of the thermoelectric module, and a PID controller with SCR(Silicon Control Rectifier) control the input power of the thermoelectric module. Temperature control performance is evaluated by experiment and simulation. The control is heating and cooling at the same time by PID controller. So reducing temperature control error. The unit is consists of an air cycle method, so reduce the time and easy to contl. also Optimizing an air current contributive improves performance of nanoimprint
대면적 임프린트 장비를 위한 LCD Glass 변형 시뮬레이션 연구
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jayil Jeong) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During this process, a small temperature variation makes thermal stress, which causes the horizontal variation of mold and glass. During alig㎚ent process to fix the LCD glass on a alig㎚ent stage, the vertical displacement is made by the absorption pressure and the shear stress. This study simulates the horizontal displacement of mold and glass due to temperature variation, the vertical displacement depending on the shape of absorption surface fixing the LCD glass in the alig㎚ent process, and the horizontal and vertical displacement which occurs in the LCD glass at the alig㎚ent process. Algor which is a FEM code for a framework simulation was applied. Temperature variation above ± 0.1℃ on mold and glass causes the horizontal displacement of 150㎚ due to thermal expansion. The vertical displacement due to the circular is ten times of the case of rectangular absorption nozzle. The displacement of the LCD glass in the alig㎚ent process is about 49㎚.
열전소자를 이용한 정밀 항온 유지 장치에 관한 실험 및 시뮬레이션 연구
박경서(Kyungseo Park),송영중(Youngjoog Song),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Jeong),신동훈(Donghoon Shin) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
During a process of a nanoimprint for manufacturing LCD, a small temperature variation on the LCD glass can cause thermal stress and generate unexpected displacement. To avoid this trouble, a precision temperature control unit using thermoelectric modules is appropriate for nanoimprint processes. The unit consists of an air control system, a cooling water control system, and a power control system. The air control system includes a thermoelectric module, thermocouples measuring temperatures of air and a duct-stale fin, and two air fans. The heat generated by the thermoelectric module is absorbed by the cooling water control system. The power control system catches the temperature of the thermoelectric module, and a PID controller with SCR controls the input power of the thermoelectric module. Temperature control performance is evaluated by experiment and simulation. The temperature control unit is able to control the exit temperature about ±2℃ from the incoming fluid temperature, and the error range is ±0.1℃. However, the control time is approximately 30minute, which needs further study of active control
대면적 임프린트 장비의 스테이지 정렬운동 과정에서 LCD Glass 변형에 대한 시뮬레이션 연구
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jayil Jeong) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During alignment process to fix the LCD glass on a alignment stage, the vertical displacement is made by the absorption pressure and the shear stress. This study simulates the vertical displacement depending on the shape of absorption surface fixing the LCD glass in the alignment process, and the horizontal and vertical displacement which occurs in the LCD glass at the alignment process. Algor which is a FEM code for a framework simulation was applied. The vertical displacement due to the circular is ten times of the case of rectangular absorption nozzle. The displacement of the LCD glass in the alignment process is about 49㎚.
유래형(Rae-hyeong Ryu),임시형(Si-Hyung Lim),정재일(Jay I. Jeong),신동훈(Donghoon Shin),장시열(Siyeol Jang),임홍재(Hongjae Im),이기성(Kee-sung Lee) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
Contacts between mold and substrate material during a process of a nano-imprint are indispensable for manufacturing LCD. Non-uniform stress and stress concentration can cause the degradation of mold and substrate materials. The stresses increase up to high value due to decreasing size of micro and nano components. Therefore the purpose of this study is to investigate the contact damage behavior of mold and substrate materials for nano-imprint apparatus. We analyzed stress change as a function of load as the line width of substrate material changes. We also examined the contact damages of Silicon, PDMS, Glass and Silicon Carbide materials using spherical indentation. The indentation load and number of cycles of contacts are varied during indentation. Indentation stress-strain curves, surface views of contact damages and mechanical properties are characterized for the mold and the substrate materials. As a result, the mechanical properties and contact damages of the nanostructured SiC showed high damage tolerance.
이재환(Jaehwan Lee),최재윤(Jaeyoon Choi),김영훈(Younghun Kim),김용보(Yongbo Kim),윤삼손(Samson Yoon),임홍재(Hongjae Im) 대한기계학회 2013 대한기계학회 춘추학술대회 Vol.2013 No.12
Remote Control Weapon System(RCWS) is the advanced defense systems to fire the long-distance target with the maximum security to the operator who is located in remote and safe place. It is able to search, chase and even shoot the target automatically. Like other weapon systems, the shooting accuracy is one of the most important performance indexes. While multiple shooting involves extremely fast and complex momentum transfer, it is a very challenging engineering problem to attain the extreme accurate shooting. In this paper, shooting simulation model for RCWS is developed to replace live fire in South Korea and to optimize the dynamic performance of the entire system. The entire system is composed of the gun, the mount and the flexible body. The internal movement of the gun during shooting is modeled with the multi-body dynamic model and correlated with the actual response. Equivalent stiffness technique is adapted to reduce the degree of freedom in flexible body and the computation time drastically. The simulation model shows a practically good agreement with the actual shooting experiment, which opens wide possibility to replace the actual shooting experiment in the development phase.