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      • KCI등재

        전기도금법을 이용하여 형성한 Au-Sn 플립칩 접속부의 미세구조 및 접속저항

        김성규,오태성,Kim, S.K.,Oh, T.S. 한국마이크로전자및패키징학회 2008 마이크로전자 및 패키징학회지 Vol.15 No.4

        Au와 Sn을 순차적으로 도금한 Au/Sn 범프를 플립칩 본딩하여 Au-Sn 솔더 접속부를 형성 후, 미세구조와 접속저항을 분석하였다. $285^{\circ}C$에서 30초간 플립칩 본딩한 Au-Sn 솔더 접속부는 $Au_5Sn$+AuSn lamellar 구조로 이루어져 있으며, 이 시편을 $310^{\circ}C$에서 3분간 유지하여 2차 리플로우시 $Au_5Sn$+AuSn interlamellar spacing이 증가하였다. $285^{\circ}C$에서 30초간 플립칩 본딩한 Au-Sn 접속부는 15.6 $m{\Omega}$/bump의 평균 접속저항을 나타내었으며, 이 시편을 다시 $310^{\circ}C$에서 3분간 유지하여 2차 리플로우 한 Au-Sn 접속부는 15.0 $m{\Omega}$/bump의 평균 접속저항을 나타내었다. Microstructure and contact resistance of the Au-Sn solder joints were characterized after flip-chip bonding of the Au/Sn bumps processed by successive electrodeposition of Au and Sn. Microstructure of the Au-Sn solder joints, formed by flip-chip bonding at $285^{\circ}C$ for 30 sec, was composed of the $Au_5Sn$+AuSn lamellar structure. The interlamellar spacing of the $Au_5Sn$+AuSn structure increased by reflowing at $310^{\circ}C$ for 3 min after flip-chip bonding. While the Au-Sn solder joints formed by flip-chip bonding at $285^{\circ}C$ for 30 sec exhibited an average contact resistance of 15.6 $m{\Omega}$/bump, the Au-Sn solder joints reflowed at $310^{\circ}C$ for 3 min after flip-chip bonding possessed an average contact resistance of 15.0 $m{\Omega}$/bump.

      • KCI등재

        Cu/Sn Rim 본딩을 이용한 MEMS 패키지의 Cap 형성공정

        김성규,오태성,문종태,Kim, S.K.,Oh, T.S.,Moon, J.T. 한국마이크로전자및패키징학회 2008 마이크로전자 및 패키징학회지 Vol.15 No.4

        캐비티 형성이 불필요한 MEMS 캡 본딩을 위해 전기도금법을 이용하여 Cu/Sn rim 구조를 형성하였으며, $25{\sim}400{\mu}m$ 범위의 rim 폭에 따른 본딩특성을 분석하였다. Cu/Sn rim의 폭이 증가함에 따라 rim 패키지 내부의 유효 실장면적비가 감소하는 반면에 파괴하중비가 증가하며, Cu/Sn rim 폭이 150 ${\mu}m$일 때 유효 실장면적비와 파괴하중비를 최적화할 수 있을 것으로 예측되었다. 폭 25 ${\mu}m$ 및 폭 50 ${\mu}m$인 Cu/Sn rim 접합부에서는 모든 계면에서 본딩이 이루어진 반면에, 100 ${\mu}m$ 이상의 폭을 갖는 rim 접합부에서는 Sn 도금표면의 거칠기에 의해 본딩이 이루어지지 않은 기공 부위가 관찰되었다. To develop the MEMS cap bonding process without cavity formation, we electroplated Cu/Sn rim structures and measured the bonding characteristics for the Cu/Sn rims of $25{\sim}400{\mu}m$ width. As the effective device-mounting area ratio decreased and the failure strength ratio increased for wider Cu/Sn rim, these two properties were estimated to be optimized for the Cu/Sn rim with 150 ${\mu}m$ width. Complete bonding was accomplished at the whole interfaces of the Cu/Sn packages with the rim widths of 25 ${\mu}m$ and 50 ${\mu}m$. However, voids were observed locally at the interfaces with the rim widths larger than 100 ${\mu}m$. Such voids were formed by local non-contact between the upper and lower rims due to the surface roughness of the electroplated Sn.

      • Normal Metal에서 전자와 Phonon의 상호작용

        張光秀,金成奎 嶺南大學校附設 基礎科學硏究所 1982 基礎科學硏究 Vol.2 No.-

        In the paper we develop Green's function which enables one to consider the interaction between electrons and phonon without assuming that the interaction is small. The state which contains the 'condensate' of bound electrons can not be obtained from the ground state of noninteracting particles by applying the interaction adiabatically. We took below for normal metal, where this difficulty does not occur.

      • 음향 Intensity 측정에서 Phase Errors

        李俊河,張浩京,金禮顯,金成奎 嶺南大學校附設 基礎科學硏究所 1988 基礎科學硏究 Vol.8 No.-

        The finite-approximation errors of measuring acoustic intensity using two closely spaced microphones are examined in this paper. The phase errors are considered by measuring the residual intensity between the two microphone systems exposing them to the same sound over awide range of frequencies. The loudspeaker in the pressure chamber is fed with white or pink noise, and the pressure spectra from the two microphones is identical. The measuring errors are estimated by checking the difference between the measured sound pressure and sound intensity. For the microphone separation of 12mm, the finite-approximation errors are shown to be less than ±1dB from 125 Hz to 5KHz.

      • Perennial ryegrass의 生産性에 關한 硏究 : 生育段階別乾物收量과 收量構成要素의 品種間 差異 Varietial differences in dry matter yields and yield components according to growth stages

        金聖圭 건국대학교 1989 論文集 Vol.28 No.1

        This experiment was carried out to compare with the varietal differences in dry matter production and its relationships with yield components, specific leaf weight and leaf area index analyzed in sward condition according to different growth stages. The varieties examined were 'Maprima', 'Fawn', 'Alta', 'Caliente', 'Tempo' and 'P-2', The results obtained were as follows ; 1.The dry matter weight(DW) was correlated positive significant correlation with the number of tillers(NT) and leaf area index(LAI) at the early stage of growth(T1). But, there were not positive significant correlation at the early heading stage(T2) and 3 weeks after the early heading stage(T3). 2.'P-2' and 'Caliente' could be classified as tiller number type because of high dry weight and a lot of number of tillers. 'Alta' and 'Tempo' could be classified as tiller weight type because of high dry weight but a few number of tillers. 3.CGR was positive significant correlation with MLAI and NAR at vegetative growth stage but there wasn't significant correlation at reproductive growth stage. 4.Light diminution coefficient(K') was negatively correlated with mean dry weight of varieties

      • KCI등재

        폐암환자의 세기조절방사선치료에서 에너지에 따른 선량분포 특성 비교

        김성규,김명세,윤상모,Kim, Sung-Kyu,Kim, Myung-Se,Yun, Sang-Mo 한국의학물리학회 2008 의학물리 Vol.19 No.3

        PTV considered for the energy, dose distribution exposed to lung and spinal cord, and the characteristic of DVH(Dose Volume Histogram) were compared and investigated by planning the intensity modulated radiation therapy (IMRT) using the photon energies of 6 MV and 10 MV according to tumor location like as the anterior, middle, and posterior regions of lung, and the mediastinum region in lung cancer patients. Our institution installed the linear accelerator (Varian 21 EX-s, USA) equipped with 120 multileaf collimator for lung cancer patients, which is producing the photon energies of 6 MV and 10 MV, and radiation therapy planning was performed with ECLIPSE system (Varian, SomaVision 6.5, USA), which support inverse treatment planning. The tomographic images of 3 mm slice thickness for lung cancer patients were acquired using planning CT, and acquired tomographic images were sent to the Varis system, and then treatment planning was performed in the ECLIPSE system. The radiation treatment planning of the IMRT was processed from various angles according to the regions of the tumor, and using various beam lines according to the size and location of the tumor. The investigation of the characteristic of dose distributions for the energy of 6 MV and 10 MV according to tumor locations in lung cancer patients resulted that the maximum dose of 10 MV energy was 1.2% less than that of 6 MV energy without depending on the tumor location of lung cancer, and the reduction effects of MU were occurred from 10 to 25 MU. Radiation dose exposed to the lung satisfied the less 30% of V20, however radiation dose in 6 MV energy was from 0.1% to 0.5% less than that in 10 MV energy. Radiation dose exposed to the spinal cord for 6 MV energy was from 0.6% to 2.1% less than that for 6 MV energy. 폐암 환자에서 폐의 앞쪽, 폐의 중간부위, 폐의 뒤쪽, 그리고 몸의 mediastinum 부위의 위치에 따라 광자선 에너지 6 MV와 10 MV를 사용하여 세기조절방사선치료를 계획하여 에너지에 따른 PTV와 폐와 척수에 조사되는 선량분포와 Dose Volume Histogram (DVH)의 특성을 비교 검토하였다. 본원이 보유하고 있는 폐암 환자 치료용 방사선치료기는 120 다엽 콜리메이터가 부착된 선형가속장치(Varian 21 EX-s, USA)이며, 광자선 에너지는 6 MV와 10 MV가 출력되며, 방사선치료 계획은 역방향치료계획이 가능한 ECLIPSE 시스템(Varian, SomaVision 6.5, USA)을 사용하였다. 폐암 환자들의 planning CT는 3 mm 두께로 단층촬영 영상을 획득하였으며, 획득한 단층촬영 영상은 Varis 시스템으로 전송하여 ECLIPSE 시스템에서 치료계획을 시행하였다. 세기조절방사선치료법의 방선선치료계획은 종양의 부위에 따라 다양한 각도를 사용하였고, 빔의 개수도 종양의 크기와 위치에 따라 다양하게 하였다. 폐암 환자에서 종양의 위치에 따라 10 MV와 6 MV의 에너지에 대한 선량분포 특성을 비교해 본 결과 폐암에서 종양의 위치에 관계없이 최대선량에서 10 MV 에너지가 6 MV 에너지에 비해 1.2% 적게 나타났으며, MU에서도 10에서 25 정도의 MU 감소 효과가 있었다. 폐에 조사되는 방사선량은 V20이 30% 미만은 만족하고 있지만 10 MV 에너지에 비해 6 MV 에너지에서 0.1%에서 0.5% 정도 적게 조사되었다. 척수에 조사되는 방사선량은 10 MV 에너지에 비해 6 MV 에너지에서 0.6%에서 2.1% 정도 적게 조사되었다.

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