A FET-type reference electrode(REFET) is an effective method to eliminate typical problems with ISFET(ion sensitive field-effect transistor) such as drift, temperature, light-dependence and miniaturization of reference electrode. However, it is diffic...
A FET-type reference electrode(REFET) is an effective method to eliminate typical problems with ISFET(ion sensitive field-effect transistor) such as drift, temperature, light-dependence and miniaturization of reference electrode. However, it is difficult to make the highly reliable REFET with excellent long-term stability and reproducibility. In this paper, an ion-blocking membrane was applied to the REFET for the FET-type electrolyte sensors(pH, pNa-ISFET). The fabricated REFET indicated the stable sensitivity (55.4 mV/pH, 53.5 mV/decade) and good linearity in the pH and pNa measurement. In the measurement, ISFET/Pt/REFET configuration showed excellent stability and reproducibility.