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- 저자 : Tetsuya Etoh (검색결과 1 건)
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Yoshinori Ishigami,Tetsuya Etoh,Keiki Morimoto,Sang Hwa Jung,Eiji Hiraki,Hyun Woo Lee,Manabu Ishitobi,Mutsuo Nakaoka 전력전자학회 2004 ICPE(ISPE)논문집 Vol.- No.-
In the semiconductor manufacturing technology as the plasma etching processing, Voltage fed-D class in-series resonant high frequency power amplifier using power MOSFET, which operates under a condition of discontinuous resonant current based soft switching, for plasma generating is introduced. This paper presents some practical and theoretical evaluation of voltage source class D phase-shifted ZVS-PWM DC-DC power converter with a high frequency<br/> transformer link and capacitor input type DC smoothing filter,<br/> which is designed for 50 KHz, by using IGBT power modulation. Its operating principle in a steady-state is described by using equivalent circuits, along with the experimental operation waveforms. The soft switching operating range for phase-shifted duty factor is illustrated and discussed by using a criteria value due to residual voltage across the lossless snubbing capacitors. The output power regulation vs phase shifted duty factor characteristics of this power converter are evaluated under a condition of ZVS commutation.<br/> Index Terms<br/> Voltage source-fed DC-DC power converter, Lossless capacitive snubbers, Phase shifted PWM, Zero voltage soft switching, High frequency transformer link, Capacitive input DC smoothing filter, Circuit soft switching operation limitation, Plasma processing applications
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