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Low-Voltage Current-Sensing CMOS Interface Circuit for Piezo-Resistive Pressure Sensor
Apinunt Thanachayanont,Suttisak Sangtong 한국전자통신연구원 2007 ETRI Journal Vol.29 No.1
A new low-voltage CMOS interface circuit with digital output for piezo-resistive transducer is proposed. An input current sensing configuration is used to detect change in piezo-resistance due to applied pressure and to allow lowvoltage circuit operation. A simple 1-bit first-order deltasigma modulator is used to produce an output digital bitstream. The proposed interface circuit is realized in a 0.35 μm CMOS technology and draws less than 200 μA from a single 1.5 V power supply voltage. Simulation results show that the circuit can achieve an equivalent output resolution of 9.67 bits with less than 0.23% nonlinearity error.