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유연전자회로를 위한 폴리머 기판/세라믹 아일랜드를 사용한 획기적 유연성 확보기술
윤주일(Juil Yoon),선정윤(Jeong-Yun Sun),오규환(Kyu-Hwan Oh),Joost J.Vlaask,Zhigang Suo 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.11
For a flexible electronic device integrating inorganic materials on a polymer substrate, the polymer can deform substantially, but the inorganic materials usually fracture at small strains. In this work, we show a novel approach to make such a device highly stretchable. A polyimide substrate is first coated with a thin layer of an elastomer, on top of which SiNx islands are fabricated. When the substrate is stretched to a large strain, the SiNx islands remain intact. Our simple model illustrates that the very small stiffness of the interlayer is the key to significantly reduce strains in the islands and therefore the stretchability of polymersupported ceramic island arrays has been improved remarkably.