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양민규,Jae-Wan Parkc,Sun Young Choi,Jeon-Kook Lee 한양대학교 세라믹연구소 2011 Journal of Ceramic Processing Research Vol.12 No.3
Cr-doped SrZrO3 perovskite thin films were deposited on SrRuO3 bottom electrode/SiO2/Si(100) substrates by pulsed laser deposition. The SrZrO3 : Cr perovskite and SrRuO3 bottom electrode showed a well controlled interface, as well as good resistive switching behavior with an ON/OFF ratio > 103. Resistive switching memory devices made from Cr-doped SrZrO3thin films deposited on Si substrates are expected to be more compatible with conventional Si-based electronics.