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장해규,고경범,이호녕,채희엽,Jang, Haegyu,Koh, Kyongbeom,Lee, Honyoung,Chae, Heeyeop 한국진공학회 2015 진공 이야기 Vol.2 No.4
Plasma diagnosis and multivariate analysis techniques for plasma processes are reviewed. The principles and applications of optical emission spectroscopy (OES) and VI probe are discussed briefly. The research results of principal component analysis (PCA), one of the widely used multivariate analysis techniques for plasma process monitoring is discussed in this article.