http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
방전플라즈마 소결법에 의해 제조된 Cu 타겟과 스퍼터링 박막의 특성평가
현혜영 ( Hye Young Hyun ),김민정 ( Min Jung Kim ),유정호 ( Jung Ho Yoo ),양준모 ( Jun Mo Yang ),오익현 ( Ik Hyun Oh ),이승민 ( Seung Min Lee ),오용준 ( Yong Jun Oh ) 대한금속재료학회(구 대한금속학회) 2011 대한금속·재료학회지 Vol.49 No.3
The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and Spark Plasma Sintering (SPS) were compared and analyzed. From the results, the Cu film prepared heating 60℃/min (SPS process) showed a similar specific resistance compared to the commercial cast Cu film. Also, auording to the results of XRD, SIMS, and TEM. There was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Cu target was found to have quite similar properties with the commercial one and it is expected to be applied in futare research to the metal wiring material for semiconductor/display devices.
방전플라즈마 소결법에 의해 제조된 Al 타겟과 스퍼터링 박막의 특성평가
현혜영 ( Hye Young Hyun ),김민정 ( Min Jung Kim ),유정호 ( Jung Ho Yoo ),정칠성 ( Chil Seong Jeong ),양준모 ( Jun Mo Yang ),오익현 ( Ik Hyun Oh ),박현국 ( Hyun Kuk Park ),이승민 ( Seung Min Lee ),오용준 ( Yong Jun Oh ) 대한금속재료학회(구 대한금속학회) 2011 대한금속·재료학회지 Vol.49 No.6
The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and spark plasma sintering (SPS) were compared and analyzed. The results, revealed that, the Al film prepared by heating at 60℃/min (SPS process) showed a specific resistance similar to the commercial cast Al film. In addition, the results of XRD, SIMS and TEM, showed that there was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Al target was found to have properties quite similar to the commercial one and it is expected to be applied in future research to the metal wiring material for semiconductor/display devices.