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- 저자 : 추성중 ( Sung Joong Choo ) (검색결과 2 건)
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추성중(Sung Joong Choo),박정호(Jung Ho Park),신현준(Hyun-Joon Shin) 大韓電子工學會 2010 電子工學會論文誌-SD (Semiconductor and devices) Vol.47 No.4
평판형 rib 도파로의 설계 및 공정기술을 바탕으로 632.8 ㎚에서 동작하는 집적 마흐젠더 간섭계 센서(Mach-Zehnder interferometric sensor)를 제작하였다. 단일모드와 높은 감도의 두 가지 조건을 고려하여 실리카 계열(SiO₂-SiO<SUB>x</SUB>N<SUB>y</SUB>-SiO₂) rib 도파로를 설계하였고 박막증착, 사진제판, RIE (Reactive Ion Etching)와 같은 반도체 공정들을 이용해 그 기하학적 구조를 구현하였다. 제작된 rib 도파로의 광출력을 cut-back방법으로 분석한 결과, 약 4.82 ㏈/㎝의 전파손실을 측정하였다. 동시에 크롬 식각방지 층 공정을 도입하여 마흐젠더 간섭계 칩 위에 감지영역(sensing zone)을 형상화할 때 발생하는 코어 층 손상을 방지하였다. 제작된 마흐젠더 간섭계 센서를 이용한 증류수/에탄올 혼합물 굴절률 측정실험을 통해 약 π/(4.04×10<SUP>-3</SUP>)의 소자 감도(sensitivity)를 최종 확인하였다. An integrated Mach-Zehnder interferometric sensor operating at 632.8 ㎚ was designed and fabricated by the technology of planar rib waveguides. Rib waveguide based on silica system (SiO₂-SiO<SUB>x</SUB>N<SUB>y</SUB>-SiO₂) was geometrically designed to have single mode operation and high sensitivity. It was structured by semiconductor fabrication processes such as thin film deposition, photolithography, and RIE (Reactive Ion Etching). With the power observation, propagation loss measurement by cut-back method showed about 4.82 ㏈/㎝ for rib waveguides. Additionally the chromium mask process for an etch stop was employed to solve the core damaging problem in patterning the sensing zone on the chip. Refractive index measurement of water/ethanol mixture with this device finally showed a sensitivity of about π/(4.04×10<SUP>-3</SUP>).
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자동차 조향장치용 TAS module을 위한 Multi-track Encoder기반 신호처리보드의 구현
우승탁 ( Seong Tak Woo ),한춘수 ( Chun Soo Han ),백준병 ( Jun Byung Baek ),이상훈 ( Sang-hoon Lee ),정민우 ( Min Woo Jung ),추성중 ( Sung Joong Choo ),박재률 ( Jae Roul Park ),유종호 ( Jong-ho Yoo ),정상훈 ( Sanghun Jung ),김주영 한국센서학회 2017 센서학회지 Vol.26 No.6
As 4.0 industry has been developed, research on a self-driving car technology and related parts of an automobile has been highly investigated recently. Particularly, a TAS(Torque Angle Sensor) module on steering wheel system has been considered as a key technology because of its precise angle, torque detection and high speed signal processing. The environmental assessment is generally required on the TAS module to examine high resolution of angle/torque detection. In the case of existing TAS module, angle detection errors has been occurred by back-lash on main and sub gear in addition to complicated structure caused by gears. In this paper, a structure of the TAS module, which minimizes the numbers of components and angle detection errors on the module compared with the existing TAS module, for vehicle steering system based on a Multi-track Encoder has been proposed. Also, angle detection signal processing board, and key technology of the TAS module were fabricated and evaluated. As a result of the experiments, we confirmed an excellent performance of the fabricated signal processing board for angle detection and an applicability of the fabricated angle detection board on the TAS module of vehicles by the environmental assessment an automobile standard.
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