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이정호(J.H.Lee),최대규(D.K.Choi),최상돈(S.D.Choi),최해영(H.Y.Choi),원충연(C.Y.Won),김수석(S.S.Kim) 전력전자학회 2003 전력전자학술대회 논문집 Vol.2003 No.7(1)
When ICP(Inductive Coupled Plasma) type etching and wafer manufacturing is being processed m semiconductor process, a noxious gas in PFC and CFC system is generated Gas cleaning dry scrubber is to remove This noxious gas. This paper describes a power source device, 2MHz switching frequency class 2kW RF Generator, used as a main power source of the gas cleaning dry scrubber. The power stage of DC/DC converter is consist of full bridge type converter with 100kHz switching frequency. Power amplifier is push pull type inverter with 2MHz switching frequency, and transmission line transformer The adequacy of the circuit type and the reliability of generating plasma In various load conditions are verified through 50Ω dummy load and chamber experiments result
대용량 ZVS FB DC/DC 컨버터에 있어서 Digital-To-Phase Shift PWM 발생회로
김은수(E. S. Kim),김태진(T. J Kim),최해영(C. H. Choi),박순구(S. G Park),김윤호(Y. H. Kim),이재학(J. H. Lee) 전력전자학회 1999 전력전자학술대회 논문집 Vol.1999 No.7
With the advent of the high-speed microprocessor and DSP, the possibility of executing a control strategy m digital domain has become a reality. By the use of the DSP and microprocessor controller, many high power converters such as especially inverter and motor drive system may be enhanced resulting m the improved robustness to EMI, the ability to communicate the operating conditions and the ease of adjusting the control parameters, But, the digital controller using DSP or microprocessor is not applied m the high frequency switching power supplies, espe챠ally full bridge DC/DC converter So, this paper presents the method and realization of designing a digital-to-phase shift PWM circuit for full digital controlled full bridge DC/DC converter with zero voltage switching, The operating principles, simulation and experimental results will be presented,