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유영은(Yeong-Eun Yoo),서영호(Young Ho Seo),최두선(Doo-Sun Choi),이준형(Jun Hyung Lee),제태진(Tae Jin Che),황경현(Kyung Hyun Hwang) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
A new method is proposed to fabricate a reusable qualtz master with order of 100 nm dot pattern on its surface. Some fabrication conditions such as dose are investigated to find optimal condition. This reusable qualtz master is used directly as a stamper to injection mold the dot patterns. Polycarbonate and Polyoxymethylene are used as molding materials and the effect of the mold temperature is also investigated to see the moldabilty of the injection molding for very fine dot features.