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유한석(Han Suk Yu),이진행(Jin Haeng Lee),이형일(Hyungyil Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
In this work, the prior indentation theory for a bulk material is extended to an indentation theory for evaluation of thin-film material properties. We first select the optimal data acquisition location, where the strain gradient is the least and the effect of friction is negligible, A new numerical approach to the thin-film indentation technique is then proposed by examining the finite element solutions at the optimal point. With this new approach, from the load-depth curve, we obtain the values of Young's modulus, yield strength, strain-hardening exponent, with average errors less than 3, 5, 8% respectively.