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김태빈(Tae-Bin Kim),김현우(Hyun-Woo Kim),김가인(Ga-In Kim),양세동(Sae-Dong Yang),신민호(Min-Ho Shin) 한국조명·전기설비학회 2021 한국조명·전기설비학회 학술대회논문집 Vol.2021 No.11
This paper describes the design and control technique of a plasma power supply for 3kW LCD cleaning. 3kW plasma is used as a power supply to supply power to DBD (Dielectric Barrier Dischatge) that cleans a large area of LCD. In order to supply power stably during DBD discharge, LC resonance type topology is applied. The validity of the proposed topology is verified through experiments.
김현우(Hyun-Woo Kim),김태빈(Tae-Bin Kim),김가인(Ga-In Kim),양세동(Sae-Dong Yang),신민호(Min-Ho Shin) 한국조명·전기설비학회 2021 한국조명·전기설비학회 학술대회논문집 Vol.2021 No.11
This paper describes the design method of 1kW low-temperature plasma power supply and low-temperature torch. Low-temperature plasma is used in systems requiring dry cleaning at low temperatures, such as batteries, where the temperature is less than 50℃. Plasma power supply is designed and manufactured, and the validity of low-temperature plasma generation is verified through experimentation with low-temperature plasma.