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한명수 ( Myung Soo Han ),송우섭 ( Woosub Song ),홍정택 ( Jung Taek Hong ),이동희 ( Donghee Lee ) 한국센서학회 2018 센서학회지 Vol.27 No.5
The optical characteristics of a terahertz (THz) antenna-coupled bolometer (ACB) detector were evaluated using a pulsed quantum cascade laser (QCL) and radiation blackbody sources. We investigated a method for measuring the responsivity and noise-equivalent power (NEP) of the THz detector using two different types of light sources. When using a QCL source with a frequency of 3 THz, the average responsivity of 24 devices was 1.44×10<sup>3</sup> V/W and the average NEP of those devices was 3.33×10<sup>-9</sup> W/√Hz. The average responsivity and NEP as measured by blackbody source were 1.79×10<sup>5</sup> V/W and 6.51×10<sup>-11</sup> W/√Hz, respectively, with the measured values varying depending on the light source. This was because the output power of each light source was different, with the laser source being driven by a pulse type wave and the blackbody source being driven by a continuous wave. The power input to the THz sensor was also different. Futhermore, the responsivity and NEP values measured using band pass filter (BPF) were similar to those measured when using only THz windows. It was found that ACB sensor responds normally in the THz region to both the laser and the blackbody source, and the method was confirmed to effectively evaluate the characteristics of the THz sensor.