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Thermal Environmental Control Simulation For Large Size Imprint Equipment
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),정재일(Jayil Jeong) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During this process, a small temperature variation makes thermal stress, which causes the horizontal variation of mold and glass. During alignment process to fix the LCD glass on a alignment stage, the vertical displacement is made by the absorption pressure and the shear stress generated by align movement. This study simulates the horizontal displacement of mold and glass due to temperature variation, the vertical displacement depending on the shape of absorption surface fixing the LCD glass on alignment stage, and the horizontal and vertical displacement which occurs in the LCD glass at the alignment process. Algor which is a FEM code for a framework simulation was applied. Temperature variation above ± 0.1℃ on mold and glass causes the horizontal displacement of 150㎚ due to thermal expansion. The vertical displacement due to the circular absorption nozzle is ten times of the case of rectangular absorption nozzle. The estimated displacement of the LCD glass in the alig㎚ent process is about 4.9㎚.
대면적 임프린트 장비를 위한 LCD Glass 변형 시뮬레이션 연구
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jayil Jeong) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During this process, a small temperature variation makes thermal stress, which causes the horizontal variation of mold and glass. During alig㎚ent process to fix the LCD glass on a alig㎚ent stage, the vertical displacement is made by the absorption pressure and the shear stress. This study simulates the horizontal displacement of mold and glass due to temperature variation, the vertical displacement depending on the shape of absorption surface fixing the LCD glass in the alig㎚ent process, and the horizontal and vertical displacement which occurs in the LCD glass at the alig㎚ent process. Algor which is a FEM code for a framework simulation was applied. Temperature variation above ± 0.1℃ on mold and glass causes the horizontal displacement of 150㎚ due to thermal expansion. The vertical displacement due to the circular is ten times of the case of rectangular absorption nozzle. The displacement of the LCD glass in the alig㎚ent process is about 49㎚.
대면적 임프린트 장비의 스테이지 정렬운동 과정에서 LCD Glass 변형에 대한 시뮬레이션 연구
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jayil Jeong) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During alignment process to fix the LCD glass on a alignment stage, the vertical displacement is made by the absorption pressure and the shear stress. This study simulates the vertical displacement depending on the shape of absorption surface fixing the LCD glass in the alignment process, and the horizontal and vertical displacement which occurs in the LCD glass at the alignment process. Algor which is a FEM code for a framework simulation was applied. The vertical displacement due to the circular is ten times of the case of rectangular absorption nozzle. The displacement of the LCD glass in the alignment process is about 49㎚.