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손준혁(Jun-Hyuck Son),황성우(Sung-Woo Hwang),문성욱(Sung-Uk Moon) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Capacitive Comb drives are widely used in MEMS devices such as gyroscope, accelerometer, microgripper, resonator, etc. These comb drives have been studied for linear actuation or stable output. This paper showes the effect of new designed comb finger shape which has better linearity than common rectangular style comb fingers. The new designed capacitive micro tilt sensors have a high quality performance which verifies the simulation results. The new sensors showed enhanced e linearity and resolution compared to rectangular shape tilt sensors
홍순형(Soon Hyung Hong),김희연(Hee Yeoun Kim),이학주(Hak Ju Lee),박준협(Joon Hyub Park),문성욱(Sung Uk Moon) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Mechanical properties of micro/nano-sized materials highly depend on their microstructure such as grain morphology and crystal orientation. In this study, the relationship between the microstructure and the mechanical properties of electrodeposited and sputtered thin films used for MEMS device were investigated. Theoretical elastic modulus from texture information showed good matches with experimental values measured by nanoindenter. Furthermore, the nanowear properties of thin films were characterized by ramped and constant nanoscratch experiments, resulting that the wear depths of MEMS materials under harsh tribological condition were determined by combination of their hardness and the elastic recovery based on the microstructural origins.