http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
씨앗층이 바륨훼라이트 박막의 형성과 자기적 성질에 미치는 영향
나종갑(J. G. Na),이택동(T. D. Lee),박순자(S. J. Park) 한국자기학회 1992 韓國磁氣學會誌 Vol.2 No.1
Barium ferrite thin films were reactively deposited with Fe and BaO composite targets by a facing tergects sputtering unit. When thermally oxidized silicon wafers were used as substrates, minimum substrate heating of 750℃ was necessary for the perfect c-axis alignment in barium ferrite films. To lower the critical substrate temperature for the good c-axis alignment, such seed layers as ZnO, α-Fe₂O₃ and γ-Fe₂O₃ were tested. The excellent c-axis algnment of BaM was obtained at a substrate temperature of 600℃ on ZnO seed layer whose (002) plane was parallel to the substrate surface. The magnetic properties of the BaM film showed saturation magnetization of 295 emu/cc, perpendicular coercivity of 1.7 kOe and squareness of 0.75. Optimum deposition rate of 230 Å/min was obtained with the composite target and this was 5 to 20 times higher than those of other investigators with oxide targets.