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PbTiO_3 thin films grown on Pt-covered vicinal SrTiO_3(001) substrates
H. Fujisawa,H. Yane,Y. Hiki,S. Nakashima,M. Shimizu 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.59 No.31
We investigated the growth behavior and domain structure of PbTiO_3 thin films on Pt-covered SrTiO_3 (100) (STO) substrates by metalorganic chemical vapor deposition. The step height and terrace width of single-crystalline Pt films on 1 - 4˚ vicinal STOs along [100] and [110] were 1 - 6 and 80 - 150 nm, respectively. PbTiO_3 films were grown in the Volmer-Weber mode on Pt-covered vicinal STOs, and nanosized islands were formed at the early growth stage. Atomic force microscopy revealed that nucleation of PbTiO_3 predominantly occurred at ascending steps on the Pt surface, and that the lateral growth of PbTiO_3 islands was limited by the steps. X-ray diffraction analysis and piezoresponse force microscopy indicated that a-domain and misfit dislocations were anisotropically introduced in PbTiO_3 thin films on Pt/4˚-vicinal STO along [100]. On [110]-vicinal STOs, no significant influence of the vicinal substrate on the growth behavior or domain structure of PbTiO_3 was observed.